@Article{jsss-15-167-2026,
AUTHOR = {Long, L. and Long, F. and Schwartz, B. and Brokmann, G. and Ortlepp, T.},
TITLE = {Modeling and extraction of residual stresses in some MEMS multilayer systems},
JOURNAL = {Journal of Sensors and Sensor Systems},
VOLUME = {15},
YEAR = {2026},
NUMBER = {2},
PAGES = {167--175},
URL = {https://jsss.copernicus.org/articles/15/167/2026/},
DOI = {10.5194/jsss-15-167-2026}
}