@Article{jsss-15-53-2026,
AUTHOR = {Fischeneder, M. and Schneider, M. and Schmid, U.},
TITLE = {Active $Q$ factor control of MEMS cantilevers by integrated piezoelectric transducers for high-speed AFM applications under vacuum},
JOURNAL = {Journal of Sensors and Sensor Systems},
VOLUME = {15},
YEAR = {2026},
NUMBER = {1},
PAGES = {53--65},
URL = {https://jsss.copernicus.org/articles/15/53/2026/},
DOI = {10.5194/jsss-15-53-2026}
}