@Article{jsss-15-9-2026,
AUTHOR = {Huber, D. and Schallert, C. and Gesing, A. and Steinm\"uller-Nethl, D. and Pfusterschmied, G. and Schmid, U.},
TITLE = {Automated contactless characterization of local thin film thickness and film stress with standard MEMS structures at wafer level},
JOURNAL = {Journal of Sensors and Sensor Systems},
VOLUME = {15},
YEAR = {2026},
NUMBER = {1},
PAGES = {9--21},
URL = {https://jsss.copernicus.org/articles/15/9/2026/},
DOI = {10.5194/jsss-15-9-2026}
}