TY - JOUR A1 - Gembaczka, P. A1 - Görtz, M. A1 - Celik, Y. A1 - Jupe, A. A1 - Stühlmeyer, M. A1 - Goehlich, A. A1 - Vogt, H. A1 - Mokwa, W. A1 - Kraft, M. T1 - Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition JO - J. Sens. Sens. Syst. J1 - JSSS VL - 3 IS - 2 SP - 335 EP - 347 Y1 - 2014/12/19 PB - Copernicus Publications SN - 2194-878X UR - https://jsss.copernicus.org/articles/3/335/2014/ L1 - https://jsss.copernicus.org/articles/3/335/2014/jsss-3-335-2014.pdf DO - 10.5194/jsss-3-335-2014 ER -