TY - JOUR A1 - Täschner, R. A1 - Hiller, E. A1 - Blech, M. T1 - Offset stable piezoresistive high-temperature pressure sensors based on silicon JO - J. Sens. Sens. Syst. J1 - JSSS VL - 5 IS - 1 SP - 197 EP - 203 Y1 - 2016/06/08 PB - Copernicus Publications SN - 2194-878X UR - https://jsss.copernicus.org/articles/5/197/2016/ L1 - https://jsss.copernicus.org/articles/5/197/2016/jsss-5-197-2016.pdf DO - 10.5194/jsss-5-197-2016 ER -