@Article{jsss-6-367-2017,
AUTHOR = {Giebel, F. J. and K\"ohle, M. and Stramm, T. and Kallis, K. T. and Fiedler, H. L.},
TITLE = {Concept for a MEMS-type vacuum sensor based on electrical conductivity measurements},
JOURNAL = {Journal of Sensors and Sensor Systems},
VOLUME = {6},
YEAR = {2017},
NUMBER = {2},
PAGES = {367--374},
URL = {https://jsss.copernicus.org/articles/6/367/2017/},
DOI = {10.5194/jsss-6-367-2017}
}