%PDF-1.4 % 5 0 obj << /S /GoTo /D (abstract.1) >> endobj 8 0 obj (Abstract) endobj 9 0 obj << /S /GoTo /D (section.1) >> endobj 12 0 obj (Introduction) endobj 13 0 obj << /S /GoTo /D (section.2) >> endobj 16 0 obj (GLAD of tantalum thin films) endobj 17 0 obj << /S /GoTo /D (section.3) >> endobj 20 0 obj (FIB-SEM imaging) endobj 21 0 obj << /S /GoTo /D (section.4) >> endobj 24 0 obj (Image processing) endobj 25 0 obj << /S /GoTo /D (subsection.4.1) >> endobj 28 0 obj (Preprocessing) endobj 29 0 obj << /S /GoTo /D (subsection.4.2) >> endobj 32 0 obj (Reconstruction of sample Ta80) endobj 33 0 obj << /S /GoTo /D (subsection.4.3) >> endobj 36 0 obj (Reconstruction of sample Ta85) endobj 37 0 obj << /S /GoTo /D (subsection.4.4) >> endobj 40 0 obj (Porosity validation) endobj 41 0 obj << /S /GoTo /D (section.5) >> endobj 44 0 obj (Structural analysis) endobj 45 0 obj << /S /GoTo /D (section.6) >> endobj 48 0 obj (Conclusions) endobj 49 0 obj << /S /GoTo /D (dataavailability.1) >> endobj 52 0 obj (Data availability) endobj 53 0 obj << /S /GoTo /D (authorcontribution.1) >> endobj 56 0 obj (Author contributions) endobj 57 0 obj << /S /GoTo /D (competinginterests.1) >> endobj 60 0 obj (Competing interests) endobj 61 0 obj << /S /GoTo /D (acknowledgements.1) >> endobj 64 0 obj (Acknowledgements) endobj 65 0 obj << /S /GoTo /D (financialsupport.1) >> endobj 68 0 obj (Financial support) endobj 69 0 obj << /S /GoTo /D (reviewstatement.1) >> endobj 72 0 obj (Review statement) endobj 73 0 obj << /S /GoTo /D (biblio.1) >> endobj 76 0 obj (References) endobj 77 0 obj << /S /GoTo /D [78 0 R /Fit ] >> endobj 122 0 obj << /Length 3929 /Filter /FlateDecode >> stream xڽZ[s6~ϯУ41x'nfCET=ʯsDʴcCv w63wvu@\G'1jB=⧫W/^YVwD"?rf|ΝRGBU]r,_ n{gETIRի)ݼR0V%ߺ[KuyohCotx<}_4NIB],~gmˮr8ɹe_禝/xӚ/\`n)v2E6s;.~(3=ׇv)+aߟe5hCjIDEzU+bit(כ "gm)0)$aX8 U ܖW+[`o׳ E5OWWwC+ܠ%n.\ͮ'NG%&3?p"=Ȁy}?F/sЇ Te+':^hn8Hj֘e^nAAӊTlֳfK۲O>[::ՠz*7UZgeiDrka}QJuu$E