MikroSystemTechnik Kongress 2021
MikroSystemTechnik Kongress 2021

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09 Aug 2022
Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing
Gerald Stocker, Cristina Consani, Pooja Thakkar, Clement Fleury, Andreas Tortschanoff, Khaoula-Farah Ourak, Gerald Pühringer, Reyhaneh Jannesari, Parviz Saeidi, Elmar Aschauer, Ulf Bartl, Christoph Kovatsch, Thomas Grille, and Bernhard Jakoby
J. Sens. Sens. Syst., 11, 225–231, https://doi.org/10.5194/jsss-11-225-2022,https://doi.org/10.5194/jsss-11-225-2022, 2022
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