Articles | Volume 14, issue 2
https://doi.org/10.5194/jsss-14-219-2025
Special issue:
https://doi.org/10.5194/jsss-14-219-2025
Regular research article
 | 
21 Oct 2025
Regular research article |  | 21 Oct 2025

Development and analysis of microbridge resonators for reduced pull-in voltage and preserved resonant frequency

Haleh Nazemi, Michael Schembri, Youssef Elnemr, and Arezoo Emadi

Cited articles

Abdel-Rahman, E. M., Younis, M. I., and Nayfeh, A. H.: Characterization of the mechanical behavior of an electrically actuated microbeam, J. Micromech. Microeng., 12, 759–766, https://doi.org/10.1088/0960-1317/12/6/312, 2002. 
Batra, R. C., Porfiri, M., and Spinello, D.: Review of modeling electrostatically actuated microelectromechanical systems, Smart Mater. Struct., 16, R23–R50, https://doi.org/10.1088/0964-1726/16/6/R01, 2007. 
Bouchaala, A., Nayfeh, A. H., and Younis, M. I.: Analytical study of the frequency shifts of micro and nano clamped–clamped beam resonators due to an added mass, Meccanica, 52, 333–348, https://doi.org/10.1007/s11012-016-0412-4, 2017. 
Hussein, H. and Younis, M. I.: Analytical study of the snap-through and bistability of beams with arbitrarily initial shape, ASME J. Mech. Robot., 12, 041001, https://doi.org/10.1115/1.4045844, 2020.  
Koester, D., Cowen, A., Mahadevan, R., Stonefield, M., and Hardy, B.: PolyMUMPs design handbook, MEMSCAP Inc., https://www.cmc.ca/poly-mems-multi-user/ (last access: 9 October 2025), 2003. 
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Short summary
This research improves the performance of microbridge resonators for various applications, including gas sensing. By strategically designing the bottom electrode size relative to the microbridge length while keeping all other design parameters constant, the required operating voltage is reduced without compromising performance. Advanced modelling and experimental results demonstrate a 16 % reduction in operating voltage. These findings enhance resonator efficiency across diverse applications.
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