Articles | Volume 5, issue 2
https://doi.org/10.5194/jsss-5-283-2016
Special issue:
https://doi.org/10.5194/jsss-5-283-2016
Regular research article
 | 
19 Jul 2016
Regular research article |  | 19 Jul 2016

Hot-film and calorimetric thermal air flow sensors realized with printed board technology

Thomas Glatzl, Samir Cerimovic, Harald Steiner, Almir Talic, Roman Beigelbeck, Artur Jachimowicz, Thilo Sauter, and Franz Keplinger

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Cited articles

Cerimovic, S., Talic, A., Beigelbeck, R., Sauter, T., Kohl, F., Schalko, J., and Keplinger, F.: A Novel calorimetric flow sensor implementation based on thermal sigma-delta modulation, IEEE Sensors, 1923–1926, https://doi.org/10.1109/ICSENS.2009.5398360, 2009.
Cerimovic, S., Talic, A., Beigelbeck, R., Antlinger, H., Sauter, T., Nicolics, J., Jakoby, B., and Keplinger, F.: Bidirectional micromachined flow sensor featuring a hot film made of amorphous germanium, Measurement Science and Technology, 24, 084002, https://doi.org/10.1088/0957-0233/24/8/084002, 2013.
Chua, B. and Pak, J. J.: Miniaturized corona flow sensor operating in drift mobility increment mode for low flow velocity measurement, Sensors and Actuators A: Physical, 224, 65–71, https://doi.org/10.1016/j.sna.2015.01.022, 2015.
Cruz, S., Viana, J., Dias, D., and Rocha, L.: Pressure sensing platform for health monitoring, IEEE International Symposium on Medical Measurements and Applications (MeMeA), 1–5, https://doi.org/10.1109/MeMeA.2014.6860131, 2014.
Cubukcu, A. S., Romero, D. F. R., and Urban, G. A.: A dynamic thermal flow sensor for simultaneous measurement of thermal conductivity and flow velocity of gases, Sensors and Actuators A: Physical, 208, 73–87, https://doi.org/10.1016/j.sna.2013.12.007, 2014.
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Short summary
This paper addresses the development of flow sensors optimised for heating, ventilating, and air conditioning systems. The sensors are based on the printed circuit board technology facilitating robust, flexible (in terms of layout), and cost-effective devices. Two approaches for measuring fluid quantities are investigated in this context and several sensor embodiments were investigated and fabricated. After experimental characterisation, measurement and simulation results were compared.
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