Articles | Volume 6, issue 1
J. Sens. Sens. Syst., 6, 87–96, 2017
https://doi.org/10.5194/jsss-6-87-2017

Special issue: Sensors and Measurement Systems 2016

J. Sens. Sens. Syst., 6, 87–96, 2017
https://doi.org/10.5194/jsss-6-87-2017
Regular research article
13 Feb 2017
Regular research article | 13 Feb 2017

The concept of thin film bulk acoustic resonators as selective CO2 gas sensors

Romy Hoffmann et al.

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Latest update: 08 Aug 2022
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Short summary
Carbon dioxide is a main greenhouse gas and a gas that well-represents air quality. Therefore, it is important to monitor the CO2 concentration in air. Creating an affordable and reliable CO2 sensor is the purpose of this paper. Using a mass-sensitive acoustic sensor (FBAR) we can detect increasing CO2 concentration by a mass increase on the sensor surface. As humidity changes often interfere with these signals the selection of CO2 over humidity changes is another topic addressed in this paper.