Articles | Volume 6, issue 1
https://doi.org/10.5194/jsss-6-87-2017
https://doi.org/10.5194/jsss-6-87-2017
Regular research article
 | 
13 Feb 2017
Regular research article |  | 13 Feb 2017

The concept of thin film bulk acoustic resonators as selective CO2 gas sensors

Romy Hoffmann, Matthias Schreiter, and Johannes Heitmann

Viewed

Total article views: 2,569 (including HTML, PDF, and XML)
HTML PDF XML Total BibTeX EndNote
1,353 1,011 205 2,569 131 125
  • HTML: 1,353
  • PDF: 1,011
  • XML: 205
  • Total: 2,569
  • BibTeX: 131
  • EndNote: 125
Views and downloads (calculated since 13 Feb 2017)
Cumulative views and downloads (calculated since 13 Feb 2017)

Viewed (geographical distribution)

Total article views: 2,504 (including HTML, PDF, and XML) Thereof 2,481 with geography defined and 23 with unknown origin.
Country # Views %
  • 1
1
 
 
 
 

Cited

Latest update: 14 Dec 2024
Download
Short summary
Carbon dioxide is a main greenhouse gas and a gas that well-represents air quality. Therefore, it is important to monitor the CO2 concentration in air. Creating an affordable and reliable CO2 sensor is the purpose of this paper. Using a mass-sensitive acoustic sensor (FBAR) we can detect increasing CO2 concentration by a mass increase on the sensor surface. As humidity changes often interfere with these signals the selection of CO2 over humidity changes is another topic addressed in this paper.