16 citations as recorded by crossref.

1. Resolution enhancement through nearfield-assistance in interference microscopy L. Hüser & P. Lehmann
2. Miniaturized interferometric confocal distance sensor for surface profiling with data rates at ultrasonic frequencies S. Hagemeier et al.
3. Electromagnetic modeling of interference, confocal, and focus variation microscopy T. Pahl et al.
4. Adaptive Threshold Algorithm for Outlier Elimination in 3D Topography Data of Metal Additive Manufactured Surfaces Obtained from Focus Variation Microscopy X. Xu et al.
5. A novel cubic‐exp evaluation algorithm considering non‐symmetrical axial response signals of confocal microscopes S. Hagemeier et al.
6. Mirau-Based CSI with Oscillating Reference Mirror for Vibration Compensation in In-Process Applications H. Serbes et al.
7. Three-Dimensional Transfer Functions of Interference Microscopes P. Lehmann et al.
8. Investigation of measurement data of low-coherence interferometry at tilted surfaces in the 3D spatial frequency domain M. Künne et al.
9. Microsphere-assisted interference microscopy for resolution enhancement L. Hüser & P. Lehmann
10. 3D modeling of coherence scanning interferometry on 2D surfaces using FEM T. Pahl et al.
11. Kombination eines neuartigen Doppelpuls-RGB-Interferometers mit einem Hartmann-Shack-Wellenfrontsensor zur dynamischen flächenhaften Topographieerfassung P. Gollor et al.
12. Low-Cost High-Speed Fiber-Coupled Interferometer for Precise Surface Profilometry S. Hagemeier et al.
13. NextG manufacturing − New extreme manufacturing paradigm from the temporal perspective L. Hu et al.
14. A 3-DoF motion error measurement system based on film interferometry F. Cheng et al.
15. Modeling of fiber-coupled confocal and interferometric confocal distance sensors M. Siebert et al.
16. Rigorous 3D modeling of confocal microscopy on 2D surface topographies T. Pahl et al.