Articles | Volume 9, issue 1
J. Sens. Sens. Syst., 9, 79–87, 2020
https://doi.org/10.5194/jsss-9-79-2020
J. Sens. Sens. Syst., 9, 79–87, 2020
https://doi.org/10.5194/jsss-9-79-2020
Regular research article
27 Feb 2020
Regular research article | 27 Feb 2020

Morphological characterization and porosity profiles of tantalum glancing-angle-deposited thin films

Tobias Ott and Gerald Gerlach

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