Articles | Volume 9, issue 1
https://doi.org/10.5194/jsss-9-79-2020
https://doi.org/10.5194/jsss-9-79-2020
Regular research article
 | 
27 Feb 2020
Regular research article |  | 27 Feb 2020

Morphological characterization and porosity profiles of tantalum glancing-angle-deposited thin films

Tobias Ott and Gerald Gerlach

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