Measurement tasks of modern micro- and nanometrology with decreasing structure sizes and rising aspect ratios require nanometre-resolving 3-D capable sensors. A 3-D probing system based on electrical interaction is presented which is operated on a nanopositioning system NMM-1. New 3-D measurement procedures for the probing system as well as for micrometrology measurement tasks in general are shown.

We report on the high-temperature piezoresistivity of carbon-containing silicon oxycarbide nanocomposites (C/SiOC). The piezoresistive behavior of the C/SiOC nanocomposites relies on the presence of dispersed nanocrystalline graphite and non-crystalline carbon domains. In comparison to highly ordered carbon, C/SiOC exhibits strongly enhanced sensitivities, even at high temperatures. Thus, k values of ca. 80 at the highest temperature reading, 1200°C, reveal that C/SiOC is a primary candidate.

The performance of a low-cost partially integrated cantilever-based airborne nanoparticle (NP) detector (CANTOR-1) is evaluated in terms of its real-time measurement and robustness. The device is used for direct reading of exposure to airborne carbon engineered nanoparticles (ENPs) in indoor workplaces.