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Journal of Sensors and Sensor Systems An open-access peer-reviewed journal
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A new metrological atomic force microscope (MAFM) head design is shown. We investigated the MAFM head in the nanomeasuring machine (NMM-1) for different high-precision and large-scale traceable measurement tasks. Due to their integration, the MAFM head can benefit from the large measuring range, high-precision and traceability of the NMM-1 for efficient measurements on different samples. The presented results show the realised macroscale measurements with sub-nanometre resolution.
JSSS | Articles | Volume 10, issue 2
J. Sens. Sens. Syst., 10, 171–177, 2021
https://doi.org/10.5194/jsss-10-171-2021

Special issue: Sensors and Measurement Science International SMSI 2020

J. Sens. Sens. Syst., 10, 171–177, 2021
https://doi.org/10.5194/jsss-10-171-2021

Regular research article 15 Jul 2021

Regular research article | 15 Jul 2021

Investigation of a metrological atomic force microscope system with a combined cantilever position, bending and torsion detection system

Yiting Wu et al.

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Short summary
A new metrological atomic force microscope (MAFM) head design is shown. We investigated the MAFM head in the nanomeasuring machine (NMM-1) for different high-precision and large-scale traceable measurement tasks. Due to their integration, the MAFM head can benefit from the large measuring range, high-precision and traceability of the NMM-1 for efficient measurements on different samples. The presented results show the realised macroscale measurements with sub-nanometre resolution.
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