Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 10, issue 2
Articles | Volume 10, issue 2
https://doi.org/10.5194/jsss-10-171-2021
© Author(s) 2021. This work is distributed under
the Creative Commons Attribution 4.0 License.
Special issue:
https://doi.org/10.5194/jsss-10-171-2021
© Author(s) 2021. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 10, issue 2
Regular research article
 | 
15 Jul 2021
Regular research article |  | 15 Jul 2021

Investigation of a metrological atomic force microscope system with a combined cantilever position, bending and torsion detection system

Yiting Wu, Elisa Wirthmann, Ute Klöpzig, and Tino Hausotte

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Short summary
A new metrological atomic force microscope (MAFM) head design is shown. We investigated the MAFM head in the nanomeasuring machine (NMM-1) for different high-precision and large-scale traceable measurement tasks. Due to their integration, the MAFM head can benefit from the large measuring range, high-precision and traceability of the NMM-1 for efficient measurements on different samples. The presented results show the realised macroscale measurements with sub-nanometre resolution.
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Special issue
Sensors and Measurement Science International SMSI 2020