Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 10, issue 2
Articles | Volume 10, issue 2
https://doi.org/10.5194/jsss-10-171-2021
© Author(s) 2021. This work is distributed under
the Creative Commons Attribution 4.0 License.
Special issue:
https://doi.org/10.5194/jsss-10-171-2021
© Author(s) 2021. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 10, issue 2
Regular research article
 | 
15 Jul 2021
Regular research article |  | 15 Jul 2021

Investigation of a metrological atomic force microscope system with a combined cantilever position, bending and torsion detection system

Yiting Wu, Elisa Wirthmann, Ute Klöpzig, and Tino Hausotte

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Cited articles

Balzer, G. F., Hausotte, T., Dorozhovets, N., Manske, M., and Jäger, G.: Tactile 3D microprobe system with exchangeable styli, Meas. Sci. Technol., 22, 094018, https://doi.org/10.1088/0957-0233/22/9/094018, 2011. 
Binning, G., Quate, C. F., and Gerber, C.: Atomic Force Microscope, Phys. Rev. Lett., 56, 930–933, https://doi.org/10.1103/PhysRevLett.56.930, 1986. 
Dai, G., Koenders, L., Pohlenz, F., Dziomba, T., and Danzebrink, H. U.: Accurate and traceable calibration of one-dimensional gratings, Meas. Sci. Technol., 16, 1241–1249, https://doi.org/10.1088/0957-0233/16/6/001, 2005. 
DIN: EN ISO 5436-1:2000-11, Geometrische Produktspezifikation (GPS) – Oberflächenbeschaffenheit: Tastschnittverfahren; Normale-Teil 1: Maßverkörperungen, ISO 5436-1:2000, Berlin, 2000. 
Dorozhovets, N., Hausotte, T., Hofmann, N., Manske, E., and Jäger, G.: Development of the interferometrical scanning probe microscope, Proc. SPIE, Interferometry XIII: Applications, 6293, 629311, https://doi.org/10.1117/12.680692, 2006. 
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A new metrological atomic force microscope (MAFM) head design is shown. We investigated the MAFM head in the nanomeasuring machine (NMM-1) for different high-precision and large-scale traceable measurement tasks. Due to their integration, the MAFM head can benefit from the large measuring range, high-precision and traceability of the NMM-1 for efficient measurements on different samples. The presented results show the realised macroscale measurements with sub-nanometre resolution.
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Sensors and Measurement Science International SMSI 2020