Articles | Volume 11, issue 2
J. Sens. Sens. Syst., 11, 299–313, 2022
https://doi.org/10.5194/jsss-11-299-2022
J. Sens. Sens. Syst., 11, 299–313, 2022
https://doi.org/10.5194/jsss-11-299-2022
Regular research article
15 Nov 2022
Regular research article | 15 Nov 2022

Impact of electrode conductivity on mass sensitivity of piezoelectric resonators at high temperatures

Sebastian Schlack et al.

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Short summary
High-temperature stable piezoelectric resonators are coated with oxide electrodes. The impact of the oxide electrode conductivity on the mass sensitivity and on the resonance frequency of the device is described by electrical and mechanical models, which are used to analyse the experimental data. Furthermore, the impact of an increasing oxide electrode conductivity is discussed with respect to the application of oxide electrodes and for gas sensing.