Articles | Volume 11, issue 2
https://doi.org/10.5194/jsss-11-299-2022
© Author(s) 2022. This work is distributed under
the Creative Commons Attribution 4.0 License.
the Creative Commons Attribution 4.0 License.
https://doi.org/10.5194/jsss-11-299-2022
© Author(s) 2022. This work is distributed under
the Creative Commons Attribution 4.0 License.
the Creative Commons Attribution 4.0 License.
Impact of electrode conductivity on mass sensitivity of piezoelectric resonators at high temperatures
Sebastian Schlack
CORRESPONDING AUTHOR
Institute for Energy Research and Physical Technologies, Clausthal
University of Technology, Goslar 38640, Germany
Hendrik Wulfmeier
Institute for Energy Research and Physical Technologies, Clausthal
University of Technology, Goslar 38640, Germany
Holger Fritze
Institute for Energy Research and Physical Technologies, Clausthal
University of Technology, Goslar 38640, Germany
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J. Sens. Sens. Syst., 15, 99–113, https://doi.org/10.5194/jsss-15-99-2026, https://doi.org/10.5194/jsss-15-99-2026, 2026
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A non-contact, optical methodology suitable for high temperatures based on laser-Doppler vibrometry is presented to directly determine piezoelectric constants. LiTaO3 is chosen as a model material as it is a representative piezoelectric material with applications in sensors and surface acoustic wave devices. The values determined range from 12 pm V-1 at 21 °C to about 15 pm V-1 at 400 °C, being in good agreement with the literature. Thus, the proof of concept for this approach has been obtained.
Dhyan Kohlmann, Marvin Schewe, Hendrik Wulfmeier, Christian Rembe, and Holger Fritze
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A very small, anharmonic but periodic signal is separated from a noise background that is orders of magnitude larger than the pure signal. The approach consists of a sequence of filters and transformations and is demonstrated on an interferometric measurement of the high-temperature chemical expansion of a thin film, containing heat haze, thermal length drift, and parasitic vibrations. The displacement is 38 % larger and the uncertainty 35 % lower than when evaluated with previous approaches.
Fabian Kohler, Monika Farina, Michal Schulz, Holger Fritze, and Jürgen Wilde
J. Sens. Sens. Syst., 11, 83–97, https://doi.org/10.5194/jsss-11-83-2022, https://doi.org/10.5194/jsss-11-83-2022, 2022
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This work shows a possibility of assembly and connection technology for use under high temperatures up to 1000 °C. A packaging concept was developed, and all the necessary material and joining technologies have been verified to be suitable for use at 1000 °C. A working sensor was built and measured in comparison to the resonator alone. All packaging materials and structures were measured electrically and dielectrically. Equivalent circuits for the packages up to 2 MHz and 1000 °C are available.
Hendrik Wulfmeier, Niklas Warnecke, Luca Pasquini, Holger Fritze, and Philippe Knauth
J. Sens. Sens. Syst., 11, 51–59, https://doi.org/10.5194/jsss-11-51-2022, https://doi.org/10.5194/jsss-11-51-2022, 2022
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A newly developed experimental setup to characterize thin polymeric films during dehydration and hydration is presented. The great advantage of this measurement device and technique is that it monitors the mass change and conductivity of the films in situ and simultaneously at virtually identical conditions. The feasibility of the technique is demonstrated by characterizing ionomer thin films. A mass resolution of ±7.9 ng is achieved. The precision of relative humidity (RH) control is ±0.15 %.
Michal Schulz, Rezvan Ghanavati, Fabian Kohler, Jürgen Wilde, and Holger Fritze
J. Sens. Sens. Syst., 10, 271–279, https://doi.org/10.5194/jsss-10-271-2021, https://doi.org/10.5194/jsss-10-271-2021, 2021
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Temperature sensors based on piezoelectric devices enable precise measurement of temperature changes in harsh environments such as high temperatures or aggressive atmospheres. In the case of this device, the change in the temperature is detected by means of the changing resonance frequency of the sensor. Here a sensor device based on catangasite (an isomorph of quartz) is presented. We discuss its behavior at elevated temperatures and confirm that it can successfully operate up to 1030 °C.
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Short summary
High-temperature stable piezoelectric resonators are coated with oxide electrodes. The impact of the oxide electrode conductivity on the mass sensitivity and on the resonance frequency of the device is described by electrical and mechanical models, which are used to analyse the experimental data. Furthermore, the impact of an increasing oxide electrode conductivity is discussed with respect to the application of oxide electrodes and for gas sensing.
High-temperature stable piezoelectric resonators are coated with oxide electrodes. The impact of...