Articles | Volume 11, issue 2
J. Sens. Sens. Syst., 11, 299–313, 2022
J. Sens. Sens. Syst., 11, 299–313, 2022
Regular research article
15 Nov 2022
Regular research article | 15 Nov 2022

Impact of electrode conductivity on mass sensitivity of piezoelectric resonators at high temperatures

Sebastian Schlack et al.

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Cited articles

Alagdal, I. A. and West, A. R.: Oxygen non-stoichiometry, conductivity and gas sensor response on SnO2 pellets, J. Mater. Chem. A, 3, 23213–23219,, 2015. 
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Bower, A. and Qi, Y.: Dynamics and Vibrations: Notes: Multi-DOF vibrations, (last access: 13 January 2021), 2011. 
Bund, A. and Schwitzgebel, G.: Signal oscillations of a piezoelectric quartz crystal in liquids caused by compressional waves, Anal. Chim. Acta, 364, 189–194,, 1998. 
Buttery, D. A. and Ward, M. D.: Measurement of Interfacial Processes at Electrode Surfaces with the Electrochemical Qurz crystal Microbalance, Chem. Rev., 92, 1355–1379,, 1992. 
Short summary
High-temperature stable piezoelectric resonators are coated with oxide electrodes. The impact of the oxide electrode conductivity on the mass sensitivity and on the resonance frequency of the device is described by electrical and mechanical models, which are used to analyse the experimental data. Furthermore, the impact of an increasing oxide electrode conductivity is discussed with respect to the application of oxide electrodes and for gas sensing.