Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 13, issue 1
Articles | Volume 13, issue 1
https://doi.org/10.5194/jsss-13-109-2024
© Author(s) 2024. This work is distributed under
the Creative Commons Attribution 4.0 License.
Special issue:
https://doi.org/10.5194/jsss-13-109-2024
© Author(s) 2024. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 13, issue 1
Regular research article
 | 
22 May 2024
Regular research article |  | 22 May 2024

Optical and tactile measurements on SiC sample defects

Jana Grundmann, Bernd Bodermann, Elena Ermilova, Matthias Weise, Andreas Hertwig, Petr Klapetek, Jila Rafighdoost, and Silvania F. Pereira

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Short summary
In power electronics, materials like silicon carbide (SiC) are increasingly being used instead of silicon. They have a lot of advantages but also require defect inspection with high accuracy. Different defect types on SiC samples are measured with various methods to determine which one is most suitable for which defect. In conclusion, each examined measurement method is sensitive to the studied defects, although they differ in speed and specialized application fields.
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