Articles | Volume 13, issue 2
https://doi.org/10.5194/jsss-13-157-2024
https://doi.org/10.5194/jsss-13-157-2024
Regular research article
 | 
08 Jul 2024
Regular research article |  | 08 Jul 2024

Concept, simulation, and fabrication of inverted grating structures for surface plasmon resonance sensors

Pongsak Sarapukdee, Dirk Schulz, and Stefan Palzer

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Short summary
The paper presents a concept for fabricating a biosensor with enhanced long-term stability and offers new options for designing photonics-based microsystems aimed at analysing biosamples. In order to couple the light used to probe samples, a grating is illuminated from the back side, thus realizing an inverted grating configuration. This offers the possibility of designing microsystems that can be operated more conveniently and with a much extended lifetime.