Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 13, issue 1
Articles | Volume 13, issue 1
https://doi.org/10.5194/jsss-13-89-2024
© Author(s) 2024. This work is distributed under
the Creative Commons Attribution 4.0 License.
Special issue:
https://doi.org/10.5194/jsss-13-89-2024
© Author(s) 2024. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 13, issue 1
Regular research article
 | 
15 May 2024
Regular research article |  | 15 May 2024

Concept for improving the form measurement results of aspheres and freeform surfaces in a tilted-wave interferometer

Gregor Scholz, Ling Yang, Markus Schake, and Ines Fortmeier

Viewed

Total article views: 788 (including HTML, PDF, and XML)
HTML PDF XML Total BibTeX EndNote
633 125 30 788 34 81
  • HTML: 633
  • PDF: 125
  • XML: 30
  • Total: 788
  • BibTeX: 34
  • EndNote: 81
Views and downloads (calculated since 15 May 2024)
Cumulative views and downloads (calculated since 15 May 2024)

Viewed (geographical distribution)

Total article views: 766 (including HTML, PDF, and XML) Thereof 766 with geography defined and 0 with unknown origin.
Country # Views %
  • 1
1
 
 
 
 

Cited

Latest update: 30 Oct 2025
Download
Short summary
Interferometric form measurement methods display ambiguities between certain form errors and the misalignment of measurement specimens. In this work, we present a concept for improving the accuracy of the form measurement of aspheres and freeform surfaces with a tilted-wave interferometer by introducing absolute distance measurements using a white light interferometer. A description of the laboratory setup and the corresponding data analysis is given together with first distance measurements.
Read more
Share
Special issue
Sensors and Measurement Science International SMSI 2023