Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 13, issue 1
Articles | Volume 13, issue 1
https://doi.org/10.5194/jsss-13-89-2024
© Author(s) 2024. This work is distributed under
the Creative Commons Attribution 4.0 License.
Special issue:
https://doi.org/10.5194/jsss-13-89-2024
© Author(s) 2024. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 13, issue 1
Regular research article
 | 
15 May 2024
Regular research article |  | 15 May 2024

Concept for improving the form measurement results of aspheres and freeform surfaces in a tilted-wave interferometer

Gregor Scholz, Ling Yang, Markus Schake, and Ines Fortmeier

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Short summary
Interferometric form measurement methods display ambiguities between certain form errors and the misalignment of measurement specimens. In this work, we present a concept for improving the accuracy of the form measurement of aspheres and freeform surfaces with a tilted-wave interferometer by introducing absolute distance measurements using a white light interferometer. A description of the laboratory setup and the corresponding data analysis is given together with first distance measurements.
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Sensors and Measurement Science International SMSI 2023