Articles | Volume 13, issue 1
https://doi.org/10.5194/jsss-13-89-2024
https://doi.org/10.5194/jsss-13-89-2024
Regular research article
 | 
15 May 2024
Regular research article |  | 15 May 2024

Concept for improving the form measurement results of aspheres and freeform surfaces in a tilted-wave interferometer

Gregor Scholz, Ling Yang, Markus Schake, and Ines Fortmeier

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Cited articles

Baer, G., Schindler, J., Pruss, C., Siepmann, J., and Osten, W.: Calibration of a non-null test interferometer for the measurement of aspheres and free-form surfaces, Opt. Express, 22, 31200, https://doi.org/10.1364/OE.22.031200, 2014. a
Beutler, A.: Metrology for the production process of aspheric lenses, Advanced Optical Technologies, 5, 211–218, https://doi.org/10.1515/aot-2016-0011, 2016. a
Chim, S. S. C. and Kino, G. S.: Phase measurements using the Mirau correlation microscope, Appl. Opt., 30, 2197, https://doi.org/10.1364/AO.30.002197, 1991. a
Chim, S. S. C. and Kino, G. S.: Three-dimensional image realization in interference microscopy, Appl. Opt., 31, 2550, https://doi.org/10.1364/AO.31.002550, 1992. a
de Groot, P., Colonna de Lega, X., Kramer, J., and Turzhitsky, M.: Determination of fringe order in white-light interference microscopy, Appl. Opt., 41, 4571, https://doi.org/10.1364/AO.41.004571, 2002. a
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Short summary
Interferometric form measurement methods display ambiguities between certain form errors and the misalignment of measurement specimens. In this work, we present a concept for improving the accuracy of the form measurement of aspheres and freeform surfaces with a tilted-wave interferometer by introducing absolute distance measurements using a white light interferometer. A description of the laboratory setup and the corresponding data analysis is given together with first distance measurements.