Articles | Volume 14, issue 2
https://doi.org/10.5194/jsss-14-227-2025
© Author(s) 2025. This work is distributed under the Creative Commons Attribution 4.0 License.
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21 Oct 2025
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| 21 Oct 2025
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Local pressure field distribution of bistable PMUTs for distance sensing
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J. Sens. Sens. Syst., 14, 89–98, 2025
Cited articles
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Akhbari, S., Sammoura, F., Eovino, B., Yang, C., and Lin, L.: Bimorph Piezoelectric Micromachined Ultrasonic Transducers, Journal of Microelectromechanical Systems, 25, 326–336, https://doi.org/10.1109/JMEMS.2016.2516510, 2016.
Akhbari, S., Sammoura, F., Shelton, S., Yang, C., Horsley, D., and Lin, L.: Highly responsive curved aluminum nitride pMUT, 27th IEEE MEMS, 26–30 January 2014, 124–127, https://doi.org/10.1109/MEMSYS.2014.6765589, 2014.
Akhbari, S., Sammoura, F., Yang, C., Heidari, A., Horsley, D., and Lin, L.: Self-curved diaphragms by stress engineering for highly responsive pMUT, 28th IEEE MEMS, 18–22 January 2015, 837–840, https://doi.org/10.1109/MEMSYS.2015.7051089, 2015.
Baborowski, J., Ledermann, N., and Muralt, P.: Piezoelectric micromachined transducers (PMUT's) based on PZT thin films, 2002 IEEE Ultrasonics Symposium 2002 Proceedings, 8–11 Oct. 2002, vol. 1052, 1051–1054, doi:10.1109/ULTSYM.2002.1192475, 2002.
