Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 14, issue 1
Articles | Volume 14, issue 1
https://doi.org/10.5194/jsss-14-27-2025
© Author(s) 2025. This work is distributed under
the Creative Commons Attribution 4.0 License.
https://doi.org/10.5194/jsss-14-27-2025
© Author(s) 2025. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 14, issue 1
Regular research article
 | 
06 Feb 2025
Regular research article |  | 06 Feb 2025

Effects of potassium sodium niobate (KNN) thickness on biaxial non-resonant microelectromechanical systems (MEMS) mirror performance

Laurent Mollard, Christel Dieppedale, Antoine Hamelin, Romain Liechti, and Gwenael Le Rhun

Viewed

Total article views: 1,035 (including HTML, PDF, and XML)
HTML PDF XML Total BibTeX EndNote
689 285 61 1,035 38 118
  • HTML: 689
  • PDF: 285
  • XML: 61
  • Total: 1,035
  • BibTeX: 38
  • EndNote: 118
Views and downloads (calculated since 06 Feb 2025)
Cumulative views and downloads (calculated since 06 Feb 2025)

Viewed (geographical distribution)

Total article views: 998 (including HTML, PDF, and XML) Thereof 998 with geography defined and 0 with unknown origin.
Country # Views %
  • 1
1
 
 
 
 

Cited

Latest update: 16 Aug 2026
Download
Short summary
Microelectromechanical systems mirrors are used in applications such as projection, biological imaging, and light detection and ranging due to their compact size, affordable price, and low power consumption. Piezoelectric actuation with lead zirconate titanate offers high force and fast response but raises environmental concerns due to its lead content. Potassium sodium niobate is a promising lead-free alternative, exhibiting high performance on 200 mm silicon substrates.
Read more
Share