Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 14, issue 1
Articles | Volume 14, issue 1
https://doi.org/10.5194/jsss-14-27-2025
© Author(s) 2025. This work is distributed under
the Creative Commons Attribution 4.0 License.
https://doi.org/10.5194/jsss-14-27-2025
© Author(s) 2025. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 14, issue 1
Regular research article
 | 
06 Feb 2025
Regular research article |  | 06 Feb 2025

Effects of potassium sodium niobate (KNN) thickness on biaxial non-resonant microelectromechanical systems (MEMS) mirror performance

Laurent Mollard, Christel Dieppedale, Antoine Hamelin, Romain Liechti, and Gwenael Le Rhun

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Short summary
Microelectromechanical systems mirrors are used in applications such as projection, biological imaging, and light detection and ranging due to their compact size, affordable price, and low power consumption. Piezoelectric actuation with lead zirconate titanate offers high force and fast response but raises environmental concerns due to its lead content. Potassium sodium niobate is a promising lead-free alternative, exhibiting high performance on 200 mm silicon substrates.
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