Articles | Volume 14, issue 1
https://doi.org/10.5194/jsss-14-27-2025
© Author(s) 2025. This work is distributed under the Creative Commons Attribution 4.0 License.
Regular research article
| 
06 Feb 2025
Regular research article |
| 06 Feb 2025
| 06 Feb 2025
Effects of potassium sodium niobate (KNN) thickness on biaxial non-resonant microelectromechanical systems (MEMS) mirror performance
Related subject area
Sensor technologies: MEMS technology
Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors
Calibration of tri-axial MEMS accelerometers in the low-frequency range – Part 2: Uncertainty assessment
Calibration of tri-axial MEMS accelerometers in the low-frequency range – Part 1: comparison among methods
Concept for a MEMS-type vacuum sensor based on electrical conductivity measurements
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J. Sens. Sens. Syst., 7, 245–257, 2018
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