Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 15, issue 1
Articles | Volume 15, issue 1
https://doi.org/10.5194/jsss-15-53-2026
© Author(s) 2026. This work is distributed under
the Creative Commons Attribution 4.0 License.
https://doi.org/10.5194/jsss-15-53-2026
© Author(s) 2026. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 15, issue 1
Regular research article
 | 
23 Mar 2026
Regular research article |  | 23 Mar 2026

Active Q factor control of MEMS cantilevers by integrated piezoelectric transducers for high-speed AFM applications under vacuum

Martin Fischeneder, Michael Schneider, and Ulrich Schmid

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Short summary
Scanning electron microscopy (SEM) and atomic force microscopy (AFM) enable sub-nanometer surface imaging and complement each other's limitations. Integrating AFM into a SEM vacuum chamber combines their strengths. However, vacuum increases the cantilever's Q factor and reduces scan speed. We develop a feedback circuit and a piezoelectric MEMS cantilever to tune the Q factor, enabling vacuum AFM at air-like speeds.
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