Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 15, issue 1
Articles | Volume 15, issue 1
https://doi.org/10.5194/jsss-15-53-2026
© Author(s) 2026. This work is distributed under
the Creative Commons Attribution 4.0 License.
https://doi.org/10.5194/jsss-15-53-2026
© Author(s) 2026. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 15, issue 1
Regular research article
 | 
23 Mar 2026
Regular research article |  | 23 Mar 2026

Active Q factor control of MEMS cantilevers by integrated piezoelectric transducers for high-speed AFM applications under vacuum

Martin Fischeneder, Michael Schneider, and Ulrich Schmid

Viewed

Total article views: 98 (including HTML, PDF, and XML)
HTML PDF XML Total BibTeX EndNote
57 32 9 98 4 6
  • HTML: 57
  • PDF: 32
  • XML: 9
  • Total: 98
  • BibTeX: 4
  • EndNote: 6
Views and downloads (calculated since 23 Mar 2026)
Cumulative views and downloads (calculated since 23 Mar 2026)

Viewed (geographical distribution)

Total article views: 83 (including HTML, PDF, and XML) Thereof 83 with geography defined and 0 with unknown origin.
Country # Views %
  • 1
1
 
 
 
 
Latest update: 30 Apr 2026
Download
Short summary
Scanning electron microscopy (SEM) and atomic force microscopy (AFM) enable sub-nanometer surface imaging and complement each other's limitations. Integrating AFM into a SEM vacuum chamber combines their strengths. However, vacuum increases the cantilever's Q factor and reduces scan speed. We develop a feedback circuit and a piezoelectric MEMS cantilever to tune the Q factor, enabling vacuum AFM at air-like speeds.
Read more
Share