Articles | Volume 3, issue 2
https://doi.org/10.5194/jsss-3-167-2014
https://doi.org/10.5194/jsss-3-167-2014
Regular research article
 | 
08 Aug 2014
Regular research article |  | 08 Aug 2014

Fabrication and characterization of a piezoresistive humidity sensor with a stress-free package

T. Waber, M. Sax, W. Pahl, S. Stufler, A. Leidl, M. Günther, and G. Feiertag

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