Articles | Volume 3, issue 2
https://doi.org/10.5194/jsss-3-167-2014
https://doi.org/10.5194/jsss-3-167-2014
Regular research article
 | 
08 Aug 2014
Regular research article |  | 08 Aug 2014

Fabrication and characterization of a piezoresistive humidity sensor with a stress-free package

T. Waber, M. Sax, W. Pahl, S. Stufler, A. Leidl, M. Günther, and G. Feiertag

Viewed

Total article views: 3,987 (including HTML, PDF, and XML)
HTML PDF XML Total BibTeX EndNote
1,538 2,337 112 3,987 187 232
  • HTML: 1,538
  • PDF: 2,337
  • XML: 112
  • Total: 3,987
  • BibTeX: 187
  • EndNote: 232
Views and downloads (calculated since 08 Aug 2014)
Cumulative views and downloads (calculated since 08 Aug 2014)

Cited

Latest update: 06 Oct 2025
Download
Share