Regular research article
|
08 Aug 2014
Regular research article |

|
08 Aug 2014
Fabrication and characterization of a piezoresistive humidity sensor with a stress-free package
T. Waber, M. Sax, W. Pahl, S. Stufler, A. Leidl, M. Günther, and G. Feiertag
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Latest update: 26 Apr 2026