Fabrication and characterization of a piezoresistive humidity sensor with a stress-free package

Waber, T.; Sax, M.; Pahl, W.; Stufler, S.; Leidl, A.; Günther, M.; Feiertag, G.

doi:https://doi.org/10.5194/jsss-3-167-2014

Articles | Volume 3, issue 2

https://doi.org/10.5194/jsss-3-167-2014

© Author(s) 2014. This work is distributed under
the Creative Commons Attribution 3.0 License.

https://doi.org/10.5194/jsss-3-167-2014

© Author(s) 2014. This work is distributed under
the Creative Commons Attribution 3.0 License.

Articles | Volume 3, issue 2

Regular research article

|

08 Aug 2014

Regular research article |

| 08 Aug 2014

Fabrication and characterization of a piezoresistive humidity sensor with a stress-free package

T. Waber, M. Sax, W. Pahl, S. Stufler, A. Leidl, M. Günther, and G. Feiertag

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Total article views: 3,620 (including HTML, PDF, and XML)

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PDF: 2,219
XML: 97
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Views and downloads (calculated since 08 Aug 2014)

Month	HTML	PDF	XML	Total
Aug 2014	33	85	1	119
Sep 2014	41	47	1	89
Oct 2014	12	33	1	46
Nov 2014	5	32	3	40
Dec 2014	4	19	0	23
Jan 2015	3	14	0	17
Feb 2015	6	8	0	14
Mar 2015	7	6	0	13
Apr 2015	11	9	1	21
May 2015	6	6	0	12
Jun 2015	29	8	2	39
Jul 2015	22	22	0	44
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Oct 2015	11	11	2	24
Nov 2015	9	11	0	20
Dec 2015	4	8	1	13
Jan 2016	8	17	2	27
Feb 2016	3	14	0	17
Mar 2016	3	8	0	11
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May 2016	6	3	2	11
Jun 2016	1	1	0	2
Jul 2016	5	3	1	9
Aug 2016	1	4	0	5
Sep 2016	4	3	0	7
Oct 2016	3	8	1	12
Nov 2016	2	3	0	5
Dec 2016	5	4	0	9
Jan 2017	6	3	0	9
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Feb 2018	19	54	3	76
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Apr 2018	9	31	1	41
May 2018	14	29	2	45
Jun 2018	6	24	2	32
Jul 2018	8	11	1	20
Aug 2018	10	9	2	21
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Oct 2018	14	18	2	34
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Jan 2019	10	18	3	31
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Apr 2019	6	22	1	29
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Mar 2023	11	9	1	21
Apr 2023	2	5	0	7
May 2023	5	9	2	16
Jun 2023	4	8	0	12
Jul 2023	3	11	0	14
Aug 2023	8	11	1	20
Sep 2023	5	7	1	13
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Nov 2023	6	1	0	7
Dec 2023	13	3	2	18
Jan 2024	31	4	0	35
Feb 2024	2	1	0	3
Mar 2024	10	3	1	14
Apr 2024	14	4	3	21
May 2024	7	3	2	12
Jun 2024	26	6	3	35
Jul 2024	1	0	1

Cumulative views and downloads (calculated since 08 Aug 2014)

Month	HTML	PDF	XML	Total
Aug 2014	33	85	1	119
Sep 2014	41	47	1	89
Oct 2014	12	33	1	46
Nov 2014	5	32	3	40
Dec 2014	4	19	0	23
Jan 2015	3	14	0	17
Feb 2015	6	8	0	14
Mar 2015	7	6	0	13
Apr 2015	11	9	1	21
May 2015	6	6	0	12
Jun 2015	29	8	2	39
Jul 2015	22	22	0	44
Aug 2015	10	14	3	27
Sep 2015	9	15	2	26
Oct 2015	11	11	2	24
Nov 2015	9	11	0	20
Dec 2015	4	8	1	13
Jan 2016	8	17	2	27
Feb 2016	3	14	0	17
Mar 2016	3	8	0	11
Apr 2016	4	6	1	11
May 2016	6	3	2	11
Jun 2016	1	1	0	2
Jul 2016	5	3	1	9
Aug 2016	1	4	0	5
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Oct 2016	3	8	1	12
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Jan 2017	6	3	0	9
Feb 2017	6	3	1	10
Mar 2017	10	307	0	317
Apr 2017	16	27	0	43
May 2017	21	35	1	57
Jun 2017	7	24	1	32
Jul 2017	3	22	0	25
Aug 2017	4	54	0	58
Sep 2017	5	53	0	58
Oct 2017	6	67	0	73
Nov 2017	9	64	2	75
Dec 2017	11	72	1	84
Jan 2018	5	65	0	70
Feb 2018	19	54	3	76
Mar 2018	11	41	1	53
Apr 2018	9	31	1	41
May 2018	14	29	2	45
Jun 2018	6	24	2	32
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Nov 2018	16	28	1	45
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Aug 2023	8	11	1	20
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Dec 2023	13	3	2	18
Jan 2024	31	4	0	35
Feb 2024	2	1	0	3
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Apr 2024	14	4	3	21
May 2024	7	3	2	12
Jun 2024	26	6	3	35
Jul 2024	1	0	1

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Latest update: 03 Jul 2024

Fabrication and characterization of a piezoresistive humidity sensor with a stress-free package

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5 citations as recorded by crossref.