Articles | Volume 3, issue 2
https://doi.org/10.5194/jsss-3-167-2014
https://doi.org/10.5194/jsss-3-167-2014
Regular research article
 | 
08 Aug 2014
Regular research article |  | 08 Aug 2014

Fabrication and characterization of a piezoresistive humidity sensor with a stress-free package

T. Waber, M. Sax, W. Pahl, S. Stufler, A. Leidl, M. Günther, and G. Feiertag

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Cited articles

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Buchhold, R., Nakladal, A., Gerlach, G., Sahre, K., Eichhorn, K.-J., Herold, M., and Gauglitz, G.: Influence of moisture-uptake on mechanical properties of polymers used in microelectronics, MRS Proceedings, 511, 359–364, 1998b.
Buchhold, R., Nakladal, A., Gerlach, G., Sahre, K., Eichhorn, K.-J., and Müller, M.: Reduction of mechanical stress in micromachined components caused by humidity-induced volume expanison of polymer layers, Microsystem Technol., 5, 3–12, 1998c.
Buchhold, R., Nakladal, A., Gerlach, G., and Neumann, P.: Design studies on pieoresistive humidity sensors, Sensors Actuators B, 53, 1–7, 1998d.
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