Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition

Gembaczka, P.; Görtz, M.; Celik, Y.; Jupe, A.; Stühlmeyer, M.; Goehlich, A.; Vogt, H.; Mokwa, W.; Kraft, M.

doi:https://doi.org/10.5194/jsss-3-335-2014

Articles | Volume 3, issue 2

https://doi.org/10.5194/jsss-3-335-2014

© Author(s) 2014. This work is distributed under
the Creative Commons Attribution 3.0 License.

https://doi.org/10.5194/jsss-3-335-2014

© Author(s) 2014. This work is distributed under
the Creative Commons Attribution 3.0 License.

Articles | Volume 3, issue 2

Regular research article

|

19 Dec 2014

Regular research article |

| 19 Dec 2014

Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition

P. Gembaczka, M. Görtz, Y. Celik, A. Jupe, M. Stühlmeyer, A. Goehlich, H. Vogt, W. Mokwa, and M. Kraft

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Total article views: 3,149 (including HTML, PDF, and XML)

HTML	PDF	XML	Total	BibTeX	EndNote
1,232	1,649	268	3,149	141	155

HTML: 1,232
PDF: 1,649
XML: 268
Total: 3,149
BibTeX: 141
EndNote: 155

Views and downloads (calculated since 19 Dec 2014)

Month	HTML	PDF	XML	Total
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Jan 2015	23	27	2	52
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Mar 2015	13	9	0	22
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May 2015	7	10	1	18
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Oct 2015	19	102	3	124
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Jan 2016	10	31	2	43
Feb 2016	7	24	3	34
Mar 2016	8	23	1	32
Apr 2016	2	29	1	32
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Jun 2016	1	5	1	7
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Jan 2024	4	7	0	11
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Mar 2024	9	14	1	24
Apr 2024	14	11	4	29
May 2024	10	8	4	22
Jun 2024	23	4	3	30
Jul 2024	16	2	1	19
Aug 2024	20	5	5	30
Sep 2024	7	3	1	11
Oct 2024	10	8	0	18
Nov 2024	4	18	0	22
Dec 2024	4	12	1	17
Jan 2025	13	15	1	29
Feb 2025	13	6	1	20
Mar 2025	9	19	2	30
Apr 2025	13	15	0	28
May 2025	14	11	1	26
Jun 2025	45	22	0	67
Jul 2025	19	7	0	26

Cumulative views and downloads (calculated since 19 Dec 2014)

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Jan 2015	23	27	2	52
Feb 2015	9	12	0	21
Mar 2015	13	9	0	22
Apr 2015	13	13	1	27
May 2015	7	10	1	18
Jun 2015	25	2	0	27
Jul 2015	22	13	0	35
Aug 2015	10	16	2	28
Sep 2015	15	64	1	80
Oct 2015	19	102	3	124
Nov 2015	11	80	1	92
Dec 2015	5	41	1	47
Jan 2016	10	31	2	43
Feb 2016	7	24	3	34
Mar 2016	8	23	1	32
Apr 2016	2	29	1	32
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Oct 2017	6	12	6	24
Nov 2017	11	20	8	39
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Jun 2025	45	22	0	67
Jul 2025	19	7	0	26

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Latest update: 14 Jul 2025

Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition

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