Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition

Gembaczka, P.; Görtz, M.; Celik, Y.; Jupe, A.; Stühlmeyer, M.; Goehlich, A.; Vogt, H.; Mokwa, W.; Kraft, M.

doi:10.5194/jsss-3-335-2014

Articles | Volume 3, issue 2

https://doi.org/10.5194/jsss-3-335-2014

© Author(s) 2014. This work is distributed under
the Creative Commons Attribution 3.0 License.

https://doi.org/10.5194/jsss-3-335-2014

© Author(s) 2014. This work is distributed under
the Creative Commons Attribution 3.0 License.

Articles | Volume 3, issue 2

Regular research article

|

19 Dec 2014

Regular research article |

| 19 Dec 2014

Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition

P. Gembaczka, M. Görtz, Y. Celik, A. Jupe, M. Stühlmeyer, A. Goehlich, H. Vogt, W. Mokwa, and M. Kraft

Viewed

Total article views: 3,726 (including HTML, PDF, and XML)

HTML	PDF	XML	Total	BibTeX	EndNote
1,570	1,850	306	3,726	189	255

HTML: 1,570
PDF: 1,850
XML: 306
Total: 3,726
BibTeX: 189
EndNote: 255

Views and downloads (calculated since 19 Dec 2014)

Month	HTML	PDF	XML	Total
Dec 2014	34	51	1	86
Jan 2015	23	27	2	52
Feb 2015	9	12	0	21
Mar 2015	13	9	0	22
Apr 2015	13	13	1	27
May 2015	7	10	1	18
Jun 2015	25	2	0	27
Jul 2015	22	13	0	35
Aug 2015	10	16	2	28
Sep 2015	15	64	1	80
Oct 2015	19	102	3	124
Nov 2015	11	80	1	92
Dec 2015	5	41	1	47
Jan 2016	10	31	2	43
Feb 2016	7	24	3	34
Mar 2016	8	23	1	32
Apr 2016	2	29	1	32
May 2016	2	8	1	11
Jun 2016	1	5	1	7
Jul 2016	1	9	1	11
Aug 2016	1	2	1	4
Sep 2016	2	6	0	8
Oct 2016	2	6	1	9
Nov 2016	3	3	1	7
Dec 2016	5	6	3	14
Jan 2017	5	13	2	20
Feb 2017	7	10	4	21
Mar 2017	11	19	5	35
Apr 2017	10	39	8	57
May 2017	11	14	9	34
Jun 2017	7	11	9	27
Jul 2017	3	17	4	24
Aug 2017	4	17	3	24
Sep 2017	7	23	4	34
Oct 2017	6	12	6	24
Nov 2017	11	20	8	39
Dec 2017	10	10	5	25
Jan 2018	6	22	7	35
Feb 2018	18	14	9	41
Mar 2018	8	15	3	26
Apr 2018	10	16	3	29
May 2018	13	13	3	29
Jun 2018	8	16	9	33
Jul 2018	10	14	3	27
Aug 2018	14	19	4	37
Sep 2018	10	15	8	33
Oct 2018	10	7	4	21
Nov 2018	15	17	7	39
Dec 2018	9	9	7	25
Jan 2019	14	11	9	34
Feb 2019	3	6	6	15
Mar 2019	4	8	3	15
Apr 2019	10	7	5	22
May 2019	9	6	1	16
Jun 2019	7	11	0	18
Jul 2019	14	16	1	31
Aug 2019	7	6	1	14
Sep 2019	8	8	1	17
Oct 2019	3	4	3	10
Nov 2019	5	6	0	11
Dec 2019	7	8	0	15
Jan 2020	10	3	4	17
Feb 2020	10	7	4	21
Mar 2020	9	9	1	19
Apr 2020	4	14	3	21
May 2020	4	5	4	13
Jun 2020	35	9	2	46
Jul 2020	26	17	12	55
Aug 2020	5	6	4	15
Sep 2020	8	8	0	16
Oct 2020	12	9	0	21
Nov 2020	10	16	1	27
Dec 2020	17	16	2	35
Jan 2021	20	9	0	29
Feb 2021	11	9	0	20
Mar 2021	3	8	0	11
Apr 2021	8	10	1	19
May 2021	3	2	0	5
Jun 2021	12	7	0	19
Jul 2021	5	6	0	11
Aug 2021	6	6	0	12
Sep 2021	8	5	0	13
Oct 2021	7	15	0	22
Nov 2021	9	26	0	35
Dec 2021	12	4	0	16
Jan 2022	5	12	1	18
Feb 2022	7	11	1	19
Mar 2022	5	5	0	10
Apr 2022	7	6	1	14
May 2022	7	9	1	17
Jun 2022	11	3	1	15
Jul 2022	4	4	0	8
Aug 2022	8	4	0	12
Sep 2022	9	4	0	13
Oct 2022	8	3	0	11
Nov 2022	13	12	0	25
Dec 2022	5	9	0	14
Jan 2023	4	8	0	12
Feb 2023	7	4	1	12
Mar 2023	10	9	1	20
Apr 2023	3	2	0	5
May 2023	8	10	2	20
Jun 2023	8	3	1	12
Jul 2023	4	5	0	9
Aug 2023	6	8	2	16
Sep 2023	7	6	0	13
Oct 2023	9	8	0	17
Nov 2023	1	6	0	7
Dec 2023	7	10	0	17
Jan 2024	4	7	0	11
Feb 2024	4	4	0	8
Mar 2024	9	14	1	24
Apr 2024	14	11	4	29
May 2024	10	8	4	22
Jun 2024	23	4	3	30
Jul 2024	16	2	1	19
Aug 2024	20	5	5	30
Sep 2024	7	3	1	11
Oct 2024	10	8	0	18
Nov 2024	4	18	0	22
Dec 2024	4	12	1	17
Jan 2025	13	15	1	29
Feb 2025	13	6	1	20
Mar 2025	9	19	2	30
Apr 2025	13	15	0	28
May 2025	14	11	1	26
Jun 2025	45	22	0	67
Jul 2025	32	21	0	53
Aug 2025	18	21	1	40
Sep 2025	48	12	1	61
Oct 2025	27	13	4	44
Nov 2025	30	20	6	56
Dec 2025	25	13	1	39
Jan 2026	20	36	8	64
Feb 2026	44	9	5	58
Mar 2026	42	20	6	68
Apr 2026	40	20	5	65
May 2026	31	21	1	53
Jun 2026	2	0	2

Cumulative views and downloads (calculated since 19 Dec 2014)

Month	HTML	PDF	XML	Total
Dec 2014	34	51	1	86
Jan 2015	23	27	2	52
Feb 2015	9	12	0	21
Mar 2015	13	9	0	22
Apr 2015	13	13	1	27
May 2015	7	10	1	18
Jun 2015	25	2	0	27
Jul 2015	22	13	0	35
Aug 2015	10	16	2	28
Sep 2015	15	64	1	80
Oct 2015	19	102	3	124
Nov 2015	11	80	1	92
Dec 2015	5	41	1	47
Jan 2016	10	31	2	43
Feb 2016	7	24	3	34
Mar 2016	8	23	1	32
Apr 2016	2	29	1	32
May 2016	2	8	1	11
Jun 2016	1	5	1	7
Jul 2016	1	9	1	11
Aug 2016	1	2	1	4
Sep 2016	2	6	0	8
Oct 2016	2	6	1	9
Nov 2016	3	3	1	7
Dec 2016	5	6	3	14
Jan 2017	5	13	2	20
Feb 2017	7	10	4	21
Mar 2017	11	19	5	35
Apr 2017	10	39	8	57
May 2017	11	14	9	34
Jun 2017	7	11	9	27
Jul 2017	3	17	4	24
Aug 2017	4	17	3	24
Sep 2017	7	23	4	34
Oct 2017	6	12	6	24
Nov 2017	11	20	8	39
Dec 2017	10	10	5	25
Jan 2018	6	22	7	35
Feb 2018	18	14	9	41
Mar 2018	8	15	3	26
Apr 2018	10	16	3	29
May 2018	13	13	3	29
Jun 2018	8	16	9	33
Jul 2018	10	14	3	27
Aug 2018	14	19	4	37
Sep 2018	10	15	8	33
Oct 2018	10	7	4	21
Nov 2018	15	17	7	39
Dec 2018	9	9	7	25
Jan 2019	14	11	9	34
Feb 2019	3	6	6	15
Mar 2019	4	8	3	15
Apr 2019	10	7	5	22
May 2019	9	6	1	16
Jun 2019	7	11	0	18
Jul 2019	14	16	1	31
Aug 2019	7	6	1	14
Sep 2019	8	8	1	17
Oct 2019	3	4	3	10
Nov 2019	5	6	0	11
Dec 2019	7	8	0	15
Jan 2020	10	3	4	17
Feb 2020	10	7	4	21
Mar 2020	9	9	1	19
Apr 2020	4	14	3	21
May 2020	4	5	4	13
Jun 2020	35	9	2	46
Jul 2020	26	17	12	55
Aug 2020	5	6	4	15
Sep 2020	8	8	0	16
Oct 2020	12	9	0	21
Nov 2020	10	16	1	27
Dec 2020	17	16	2	35
Jan 2021	20	9	0	29
Feb 2021	11	9	0	20
Mar 2021	3	8	0	11
Apr 2021	8	10	1	19
May 2021	3	2	0	5
Jun 2021	12	7	0	19
Jul 2021	5	6	0	11
Aug 2021	6	6	0	12
Sep 2021	8	5	0	13
Oct 2021	7	15	0	22
Nov 2021	9	26	0	35
Dec 2021	12	4	0	16
Jan 2022	5	12	1	18
Feb 2022	7	11	1	19
Mar 2022	5	5	0	10
Apr 2022	7	6	1	14
May 2022	7	9	1	17
Jun 2022	11	3	1	15
Jul 2022	4	4	0	8
Aug 2022	8	4	0	12
Sep 2022	9	4	0	13
Oct 2022	8	3	0	11
Nov 2022	13	12	0	25
Dec 2022	5	9	0	14
Jan 2023	4	8	0	12
Feb 2023	7	4	1	12
Mar 2023	10	9	1	20
Apr 2023	3	2	0	5
May 2023	8	10	2	20
Jun 2023	8	3	1	12
Jul 2023	4	5	0	9
Aug 2023	6	8	2	16
Sep 2023	7	6	0	13
Oct 2023	9	8	0	17
Nov 2023	1	6	0	7
Dec 2023	7	10	0	17
Jan 2024	4	7	0	11
Feb 2024	4	4	0	8
Mar 2024	9	14	1	24
Apr 2024	14	11	4	29
May 2024	10	8	4	22
Jun 2024	23	4	3	30
Jul 2024	16	2	1	19
Aug 2024	20	5	5	30
Sep 2024	7	3	1	11
Oct 2024	10	8	0	18
Nov 2024	4	18	0	22
Dec 2024	4	12	1	17
Jan 2025	13	15	1	29
Feb 2025	13	6	1	20
Mar 2025	9	19	2	30
Apr 2025	13	15	0	28
May 2025	14	11	1	26
Jun 2025	45	22	0	67
Jul 2025	32	21	0	53
Aug 2025	18	21	1	40
Sep 2025	48	12	1	61
Oct 2025	27	13	4	44
Nov 2025	30	20	6	56
Dec 2025	25	13	1	39
Jan 2026	20	36	8	64
Feb 2026	44	9	5	58
Mar 2026	42	20	6	68
Apr 2026	40	20	5	65
May 2026	31	21	1	53
Jun 2026	2	0	2

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Latest update: 04 Jun 2026

Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition

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