Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 3, issue 2
Articles | Volume 3, issue 2
https://doi.org/10.5194/jsss-3-335-2014
© Author(s) 2014. This work is distributed under
the Creative Commons Attribution 3.0 License.
https://doi.org/10.5194/jsss-3-335-2014
© Author(s) 2014. This work is distributed under
the Creative Commons Attribution 3.0 License.
Articles | Volume 3, issue 2
Regular research article
 | 
19 Dec 2014
Regular research article |  | 19 Dec 2014

Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition

P. Gembaczka, M. Görtz, Y. Celik, A. Jupe, M. Stühlmeyer, A. Goehlich, H. Vogt, W. Mokwa, and M. Kraft

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