Articles | Volume 3, issue 2
https://doi.org/10.5194/jsss-3-335-2014
https://doi.org/10.5194/jsss-3-335-2014
Regular research article
 | 
19 Dec 2014
Regular research article |  | 19 Dec 2014

Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition

P. Gembaczka, M. Görtz, Y. Celik, A. Jupe, M. Stühlmeyer, A. Goehlich, H. Vogt, W. Mokwa, and M. Kraft

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Latest update: 08 Nov 2024