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Journal of Sensors and Sensor Systems An open-access peer-reviewed journal
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Volume 4, issue 1
J. Sens. Sens. Syst., 4, 111–123, 2015
https://doi.org/10.5194/jsss-4-111-2015
© Author(s) 2015. This work is distributed under
the Creative Commons Attribution 3.0 License.

Special issue: 17th ITG/GMA-Conference on Sensors and Measurement Systems...

J. Sens. Sens. Syst., 4, 111–123, 2015
https://doi.org/10.5194/jsss-4-111-2015
© Author(s) 2015. This work is distributed under
the Creative Commons Attribution 3.0 License.

Regular research article 11 Mar 2015

Regular research article | 11 Mar 2015

Partially integrated cantilever-based airborne nanoparticle detector for continuous carbon aerosol mass concentration monitoring

H. S. Wasisto1,2, S. Merzsch1,*, E. Uhde3, A. Waag1,2, and E. Peiner1,2 H. S. Wasisto et al.
  • 1Institut für Halbleitertechnik (IHT), Technische Universität Braunschweig, Braunschweig, Germany
  • 2Laboratory for Emerging Nanometrology (LENA), Braunschweig, Germany
  • 3Material Analysis and Indoor Chemistry Department (MAIC), Fraunhofer-WKI, Braunschweig, Germany
  • *now at: Infineon Technologies AG, Munich, Germany

Abstract. The performance of a low-cost partially integrated cantilever-based airborne nanoparticle (NP) detector (CANTOR-1) is evaluated in terms of its real-time measurement and robustness. The device is used for direct reading of exposure to airborne carbon engineered nanoparticles (ENPs) in indoor workplaces. As the main components, a miniaturized electrostatic aerosol sampler and a piezoresistive resonant silicon cantilever mass sensor are employed to collect the ENPs from the air stream to the cantilever surfaces and to measure their mass concentration, respectively. Moreover, to realize a real-time measurement, a frequency tracking system based on a phase-locked loop (PLL) is built and integrated into the device. Long-term ENP exposure and a wet ultrasonic cleaning method are demonstrated to estimate the limitation and extend the operating lifetime of the developed device, respectively. By means of the device calibrations performed with a standard ENP monitoring instrument of a fast mobility particle sizer (FMPS, TSI 3091), a measurement precision of ENP mass concentrations of < 55% and a limit of detection (LOD) of < 25 μg m−3 are obtained.

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The performance of a low-cost partially integrated cantilever-based airborne nanoparticle (NP) detector (CANTOR-1) is evaluated in terms of its real-time measurement and robustness. The device is used for direct reading of exposure to airborne carbon engineered nanoparticles (ENPs) in indoor workplaces.
The performance of a low-cost partially integrated cantilever-based airborne nanoparticle (NP)...
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