Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 4, issue 1
Articles | Volume 4, issue 1
https://doi.org/10.5194/jsss-4-85-2015
© Author(s) 2015. This work is distributed under
the Creative Commons Attribution 3.0 License.
https://doi.org/10.5194/jsss-4-85-2015
© Author(s) 2015. This work is distributed under
the Creative Commons Attribution 3.0 License.
Articles | Volume 4, issue 1
Regular research article
 | 
23 Feb 2015
Regular research article |  | 23 Feb 2015

Influence of the substrate on the overall sensor impedance of planar H2 sensors involving TiO2–SnO2 interfaces

L. Ebersberger and G. Fischerauer

Viewed

Total article views: 1,539 (including HTML, PDF, and XML)
HTML PDF XML Total BibTeX EndNote
906 536 97 1,539 144 143
  • HTML: 906
  • PDF: 536
  • XML: 97
  • Total: 1,539
  • BibTeX: 144
  • EndNote: 143
Views and downloads (calculated since 23 Feb 2015)
Cumulative views and downloads (calculated since 23 Feb 2015)

Cited

Latest update: 26 Dec 2024
Download
Short summary
The current contribution reports on the substrate influence in multilayer metal-oxide chemical sensors. Measurements of the impedance are used to discuss the sensor performance with quartz substrates, (laboratory) glass substrates and substrates covered by silicon-dioxide insulating layers. Numerical experiments based on previous measurement results show that inexpensive glass substrates contribute up to 97% to the overall sensor responses.
Read more