Articles | Volume 4, issue 1
https://doi.org/10.5194/jsss-4-85-2015
https://doi.org/10.5194/jsss-4-85-2015
Regular research article
 | 
23 Feb 2015
Regular research article |  | 23 Feb 2015

Influence of the substrate on the overall sensor impedance of planar H2 sensors involving TiO2–SnO2 interfaces

L. Ebersberger and G. Fischerauer

Viewed

Total article views: 1,530 (including HTML, PDF, and XML)
HTML PDF XML Total BibTeX EndNote
903 533 94 1,530 144 142
  • HTML: 903
  • PDF: 533
  • XML: 94
  • Total: 1,530
  • BibTeX: 144
  • EndNote: 142
Views and downloads (calculated since 23 Feb 2015)
Cumulative views and downloads (calculated since 23 Feb 2015)

Cited

Latest update: 21 Nov 2024
Download
Short summary
The current contribution reports on the substrate influence in multilayer metal-oxide chemical sensors. Measurements of the impedance are used to discuss the sensor performance with quartz substrates, (laboratory) glass substrates and substrates covered by silicon-dioxide insulating layers. Numerical experiments based on previous measurement results show that inexpensive glass substrates contribute up to 97% to the overall sensor responses.