Articles | Volume 4, issue 1
J. Sens. Sens. Syst., 4, 85–90, 2015
https://doi.org/10.5194/jsss-4-85-2015
J. Sens. Sens. Syst., 4, 85–90, 2015
https://doi.org/10.5194/jsss-4-85-2015
Regular research article
23 Feb 2015
Regular research article | 23 Feb 2015

Influence of the substrate on the overall sensor impedance of planar H2 sensors involving TiO2–SnO2 interfaces

L. Ebersberger and G. Fischerauer

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Latest update: 27 Nov 2022
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Short summary
The current contribution reports on the substrate influence in multilayer metal-oxide chemical sensors. Measurements of the impedance are used to discuss the sensor performance with quartz substrates, (laboratory) glass substrates and substrates covered by silicon-dioxide insulating layers. Numerical experiments based on previous measurement results show that inexpensive glass substrates contribute up to 97% to the overall sensor responses.