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Journal of Sensors and Sensor Systems An open-access peer-reviewed journal
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The current contribution reports on the substrate influence in multilayer metal-oxide chemical sensors. Measurements of the impedance are used to discuss the sensor performance with quartz substrates, (laboratory) glass substrates and substrates covered by silicon-dioxide insulating layers. Numerical experiments based on previous measurement results show that inexpensive glass substrates contribute up to 97% to the overall sensor responses.
Articles | Volume 4, issue 1
J. Sens. Sens. Syst., 4, 85–90, 2015
https://doi.org/10.5194/jsss-4-85-2015
J. Sens. Sens. Syst., 4, 85–90, 2015
https://doi.org/10.5194/jsss-4-85-2015

Regular research article 23 Feb 2015

Regular research article | 23 Feb 2015

Influence of the substrate on the overall sensor impedance of planar H2 sensors involving TiO2–SnO2 interfaces

L. Ebersberger and G. Fischerauer

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Cited articles

Barsan, N. and Weimar, U.: Conduction Model of Metal Oxide Gas Sensors, J. Electroceram., 7, 143–167, https://doi.org/10.1023/A:1014405811371, 2001.
Barsan, N., Koziej, D., and Weimar, U.: Metal oxide-based gas sensor research: How to?, Sensor. Actuat. B-Chem., 121, 18–35, https://doi.org/10.1016/j.snb.2006.09.047, 2007.
Fischerauer, A. and Fischerauer, G.: Physikalisches Modell der Materialparameterabhängigkeit des Impedanzspektrums planarer Chemosensoren in Mehrschichtbauweise, tm – Technisches Messen, 78, 15–22, https://doi.org/10.1524/teme.2011.0074, 2011.
Fischerauer, A., Schwarzmüller, Ch., and Fischerauer, G.: Substrate influence on the characteristics of interdigital-electrode gas sensors, Proc. Sixth Int'l Multi-Conf. on Systems, Signals & Devices (SSD'09), Djerba, 5 pp., https://doi.org/10.1109/ssd.2009.4956738, 23–26 March, 2009.
Fischerauer, A., Fischerauer, G., Hagen, G., and Moos, R.: Integrated impedance based hydro-carbon gas sensors with Na-zeolite/Cr2O3 thin-film interfaces: From physical modeling to devices, Phys. Status Solidi A, 208, 404–415, https://doi.org/10.1002/pssa.201026606, 2011.

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Short summary
The current contribution reports on the substrate influence in multilayer metal-oxide chemical sensors. Measurements of the impedance are used to discuss the sensor performance with quartz substrates, (laboratory) glass substrates and substrates covered by silicon-dioxide insulating layers. Numerical experiments based on previous measurement results show that inexpensive glass substrates contribute up to 97% to the overall sensor responses.
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