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3. Ultra-High Sensitivity Surface-Micromachined Capacitive Differential Pressure Sensor for Low-Pressure Applications T. Pernu et al. 10.1109/JMEMS.2022.3218857
4. Calibration approach to quantify nonlinearity of MEMS pore pressure sensors using optimal interpolation M. Barzegar et al. 10.1088/1361-6501/aca0b3
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