Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 4, issue 1
Articles | Volume 4, issue 1
https://doi.org/10.5194/jsss-4-97-2015
© Author(s) 2015. This work is distributed under
the Creative Commons Attribution 3.0 License.
https://doi.org/10.5194/jsss-4-97-2015
© Author(s) 2015. This work is distributed under
the Creative Commons Attribution 3.0 License.
Articles | Volume 4, issue 1
Review paper
 | 
27 Feb 2015
Review paper |  | 27 Feb 2015

A systematic MEMS sensor calibration framework

A. Dickow and G. Feiertag

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Short summary
In this paper we present a systematic method to determine sets of close-to-optimal sensor calibration points for a polynomial approximation.For each set of calibration points a polynomial is used to fit the nonlinear sensor response to the calibration reference. The polynomial parameters are calculated using ordinary least square fit. In an experiment, barometric MEMS pressure sensors are calibrated using the proposed calibration method at several temperatures and pressures.
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