Articles | Volume 4, issue 1
J. Sens. Sens. Syst., 4, 97–102, 2015
https://doi.org/10.5194/jsss-4-97-2015
J. Sens. Sens. Syst., 4, 97–102, 2015
https://doi.org/10.5194/jsss-4-97-2015
Review paper
27 Feb 2015
Review paper | 27 Feb 2015

A systematic MEMS sensor calibration framework

A. Dickow and G. Feiertag

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Latest update: 28 Sep 2022
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Short summary
In this paper we present a systematic method to determine sets of close-to-optimal sensor calibration points for a polynomial approximation.For each set of calibration points a polynomial is used to fit the nonlinear sensor response to the calibration reference. The polynomial parameters are calculated using ordinary least square fit. In an experiment, barometric MEMS pressure sensors are calibrated using the proposed calibration method at several temperatures and pressures.