Articles | Volume 4, issue 1
J. Sens. Sens. Syst., 4, 97–102, 2015
J. Sens. Sens. Syst., 4, 97–102, 2015

Review paper 27 Feb 2015

Review paper | 27 Feb 2015

A systematic MEMS sensor calibration framework

A. Dickow and G. Feiertag

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Cited articles

Aggarwal, P., Syed, Z., Niu, X., and El-Sheimy, N.: Cost-effective Testing and Calibration of Low Cost MEMS Sensors for Integrated Positioning, Navigation and Mapping Systems, XXIII FIG Congress, Munich, Germany, 8–13 October 2006.
Bolk, W. T.: A general digital linearising method for transducers, J. Phys. E: Sci. Instrum., 18, 61–64, 1985.
Bosch Sensortec: "BST-BMP085-DS000-03", BMP 085 digital pressure sensor datasheet, Rev. 1.0, July 2008.
Bosch Sensortec: "BST-BMP180-DS000-09", BMP 180 digital pressure sensor datasheet, Rev. 2.5, April 2013.
Brignell, J.: Digital compensation of sensors, J. Phys. E: Sci. Instrum., 20, 1097–1102, 1987.
Short summary
In this paper we present a systematic method to determine sets of close-to-optimal sensor calibration points for a polynomial approximation.For each set of calibration points a polynomial is used to fit the nonlinear sensor response to the calibration reference. The polynomial parameters are calculated using ordinary least square fit. In an experiment, barometric MEMS pressure sensors are calibrated using the proposed calibration method at several temperatures and pressures.