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Journal of Sensors and Sensor Systems An open-access peer-reviewed journal
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Volume 5, issue 1
J. Sens. Sens. Syst., 5, 55–61, 2016
https://doi.org/10.5194/jsss-5-55-2016
© Author(s) 2016. This work is distributed under
the Creative Commons Attribution 3.0 License.
J. Sens. Sens. Syst., 5, 55–61, 2016
https://doi.org/10.5194/jsss-5-55-2016
© Author(s) 2016. This work is distributed under
the Creative Commons Attribution 3.0 License.

Regular research article 25 Feb 2016

Regular research article | 25 Feb 2016

Flexible free-standing SU-8 microfluidic impedance spectroscopy sensor for 3-D molded interconnect devices application

Marc-Peter Schmidt1, Aleksandr Oseev1, Christian Engel2, Andreas Brose1, Bertram Schmidt1, and Sören Hirsch3 Marc-Peter Schmidt et al.
  • 1Institute of Micro and Sensor Systems, Otto von Guericke University Magdeburg, Universitätsplatz 2, 39106 Magdeburg, Germany
  • 2TEPROSA GmbH, Paul-Ecke-Str. 6, 39114 Magdeburg, Germany
  • 3Department of Engineering, University of Applied Sciences Brandenburg, Magdeburger Str. 50, 14770 Brandenburg an der Havel, Germany

Abstract. The current contribution reports about the fabrication technology for the development of novel microfluidic impedance spectroscopy sensors that are directly attachable on 3-D molded interconnect devices (3D-MID) that provides an opportunity to create reduced-scale sensor devices for 3-D applications. Advantages of the MID technology in particular for an automotive industry application were recently discussed (Moser and Krause, 2006). An ability to integrate electrical and fluidic parts into the 3D-MID platform brings a sensor device to a new level of the miniaturization. The demonstrated sensor is made of a flexible polymer material featuring a system of electrodes that are structured on and embedded in the SU-8 polymer. The sensor chips can be directly soldered on the MID due to the electroless plated contact pads. A flip chip process based on the opposite electrode design and the implementation of all fluidic and electrical connections at one side of the sensors can be used to assemble the sensor to a three-dimensional substrate. The developed microfluidic sensor demonstrated a predictable impedance spectrum behavior and a sufficient sensitivity to the concentration of ethanol in deionized water. To the best of our knowledge, there is no report regarding such sensor fabrication technology.

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The article reports about the development of novel microfluidic sensors that are directly attachable on 3-D polymers. An ability to integrate electrical and fluidic parts into the 3-D platform brings the sensors to a new level of miniaturization. The sensor system is made of a flexible polymer featuring a system of metal electrodes and a rigid polymer carrier with all external macroconnections. To the concentration of ethanol in DI water the sensor system showed the desired sensitivity.
The article reports about the development of novel microfluidic sensors that are directly...
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