Articles | Volume 5, issue 1
J. Sens. Sens. Syst., 5, 55–61, 2016
J. Sens. Sens. Syst., 5, 55–61, 2016

Regular research article 25 Feb 2016

Regular research article | 25 Feb 2016

Flexible free-standing SU-8 microfluidic impedance spectroscopy sensor for 3-D molded interconnect devices application

Marc-Peter Schmidt et al.

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Cited articles

Agirregabiria, M., Blanco, F. J., Berganzo, J., Arroyo, M. T., Fullaondo, A., Mayoraa, K., and Ruano-Lópeza, J. M.: Fabrication of SU-8 multilayer microstructures based on successive CMOS compatible adhesive bonding and releasing steps, Lab on a chip, 5, 545–552,, 2005.
Barsoukov, E. and Macdonald, J. R.: Impedance Spectroscopy: Theory, Experiment and Applications, John Wiley & Sons, Inc, Hoboken, NJ, USA, 2005.
Despont, M., Lorenz, H., Fahrni, N., Brugger, J., Renaud, P., and Vettiger, P.: High-aspect-ratio, ultrathick, negative-tone near-uv photoresist for MEMS applications, in: IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots, Nagoya, Japan, 26–30 January 1997, 518–522, 1997.
Ezkerra, A., Fernández, L. J., Mayora, K., and Ruano-López, J. M.: Fabrication of SU-8 free-standing structures embedded in microchannels for microfluidic control, J. Micromech. Microeng., 17, 2264–2271,, 2007.
Gawad, S., Schild, L., and Renaud, P. H.: Micromachined impedance spectroscopy flow cytometer for cell analysis and particle sizing, Lab on a chip, 1, 76–82,, 2001.
Short summary
The article reports about the development of novel microfluidic sensors that are directly attachable on 3-D polymers. An ability to integrate electrical and fluidic parts into the 3-D platform brings the sensors to a new level of miniaturization. The sensor system is made of a flexible polymer featuring a system of metal electrodes and a rigid polymer carrier with all external macroconnections. To the concentration of ethanol in DI water the sensor system showed the desired sensitivity.