Articles | Volume 5, issue 1
J. Sens. Sens. Syst., 5, 55–61, 2016
https://doi.org/10.5194/jsss-5-55-2016
J. Sens. Sens. Syst., 5, 55–61, 2016
https://doi.org/10.5194/jsss-5-55-2016

Regular research article 25 Feb 2016

Regular research article | 25 Feb 2016

Flexible free-standing SU-8 microfluidic impedance spectroscopy sensor for 3-D molded interconnect devices application

Marc-Peter Schmidt et al.

Related subject area

Sensor principles and phenomena: Chemical and biochemical sensors
Surface plasmon assisted toxic chemical NO2 gas sensor by Au ∕ ZnO functional thin films
Ravinder Gaur, Himanshu Mohan Padhy, and Manikandan Elayaperumal
J. Sens. Sens. Syst., 10, 163–169, https://doi.org/10.5194/jsss-10-163-2021,https://doi.org/10.5194/jsss-10-163-2021, 2021
Short summary
Studies on porosity in poly(N-isopropylacrylamide) hydrogels for fast-responsive piezoresistive microsensors
Daniela Franke and Gerald Gerlach
J. Sens. Sens. Syst., 10, 93–100, https://doi.org/10.5194/jsss-10-93-2021,https://doi.org/10.5194/jsss-10-93-2021, 2021
Ceramic multilayer technology as a platform for miniaturized sensor arrays for water analysis
Claudia Feller and Uwe Partsch
J. Sens. Sens. Syst., 10, 83–91, https://doi.org/10.5194/jsss-10-83-2021,https://doi.org/10.5194/jsss-10-83-2021, 2021
Short summary
Glass electrode half-cells for measuring unified pH in ethanol–water mixtures
Agnes Heering, Frank Bastkowski, and Steffen Seitz
J. Sens. Sens. Syst., 9, 383–389, https://doi.org/10.5194/jsss-9-383-2020,https://doi.org/10.5194/jsss-9-383-2020, 2020
Short summary
Cyclic and square-wave voltammetry for selective simultaneous NO and O2 gas detection by means of solid electrolyte sensors
Anastasiya Ruchets, Nils Donker, Jens Zosel, Daniela Schönauer-Kamin, Ralf Moos, Ulrich Guth, and Michael Mertig
J. Sens. Sens. Syst., 9, 355–362, https://doi.org/10.5194/jsss-9-355-2020,https://doi.org/10.5194/jsss-9-355-2020, 2020
Short summary

Cited articles

Agirregabiria, M., Blanco, F. J., Berganzo, J., Arroyo, M. T., Fullaondo, A., Mayoraa, K., and Ruano-Lópeza, J. M.: Fabrication of SU-8 multilayer microstructures based on successive CMOS compatible adhesive bonding and releasing steps, Lab on a chip, 5, 545–552, https://doi.org/10.1039/b500519a, 2005.
Barsoukov, E. and Macdonald, J. R.: Impedance Spectroscopy: Theory, Experiment and Applications, John Wiley & Sons, Inc, Hoboken, NJ, USA, 2005.
Despont, M., Lorenz, H., Fahrni, N., Brugger, J., Renaud, P., and Vettiger, P.: High-aspect-ratio, ultrathick, negative-tone near-uv photoresist for MEMS applications, in: IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots, Nagoya, Japan, 26–30 January 1997, 518–522, 1997.
Ezkerra, A., Fernández, L. J., Mayora, K., and Ruano-López, J. M.: Fabrication of SU-8 free-standing structures embedded in microchannels for microfluidic control, J. Micromech. Microeng., 17, 2264–2271, https://doi.org/10.1088/0960-1317/17/11/013, 2007.
Gawad, S., Schild, L., and Renaud, P. H.: Micromachined impedance spectroscopy flow cytometer for cell analysis and particle sizing, Lab on a chip, 1, 76–82, https://doi.org/10.1039/b103933b, 2001.
Download
Short summary
The article reports about the development of novel microfluidic sensors that are directly attachable on 3-D polymers. An ability to integrate electrical and fluidic parts into the 3-D platform brings the sensors to a new level of miniaturization. The sensor system is made of a flexible polymer featuring a system of metal electrodes and a rigid polymer carrier with all external macroconnections. To the concentration of ethanol in DI water the sensor system showed the desired sensitivity.