Articles | Volume 5, issue 1
https://doi.org/10.5194/jsss-5-95-2016
https://doi.org/10.5194/jsss-5-95-2016
Regular research article
 | 
30 Mar 2016
Regular research article |  | 30 Mar 2016

A micro-capacitive pressure sensor design and modelling

Ali E. Kubba, Ahmed Hasson, Ammar I. Kubba, and Gregory Hall

Viewed

Total article views: 6,301 (including HTML, PDF, and XML)
HTML PDF XML Total BibTeX EndNote
2,332 3,796 173 6,301 147 165
  • HTML: 2,332
  • PDF: 3,796
  • XML: 173
  • Total: 6,301
  • BibTeX: 147
  • EndNote: 165
Views and downloads (calculated since 30 Mar 2016)
Cumulative views and downloads (calculated since 30 Mar 2016)

Cited

Latest update: 23 Nov 2024
Download
Short summary
This work presents a novel design of a low power high-temperature MEMS elliptical capacitive pressure sensor that can be utilized within wireless sensor systems, e.g. TPMS. Throughout numerical and analytical analysis, it was found that sensor sensitivity and temperature resistance could be increased if the diaphragm area has two symmetrical segments of chords parallel to the major axis removed, and if diaphragm deformation increases the separation distance between the sensing capacitor plates.