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Articles | Volume 5, issue 1
https://doi.org/10.5194/jsss-5-95-2016
https://doi.org/10.5194/jsss-5-95-2016
Regular research article
 | 
30 Mar 2016
Regular research article |  | 30 Mar 2016

A micro-capacitive pressure sensor design and modelling

Ali E. Kubba, Ahmed Hasson, Ammar I. Kubba, and Gregory Hall

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Short summary
This work presents a novel design of a low power high-temperature MEMS elliptical capacitive...
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