Journal cover Journal topic
Journal of Sensors and Sensor Systems An open-access peer-reviewed journal
Journal topic

Journal metrics

CiteScore value: 3.5
CiteScore
3.5
SNIP value: 1.108
SNIP1.108
IPP value: 1.89
IPP1.89
SJR value: 0.434
SJR0.434
Scimago H <br class='widget-line-break'>index value: 18
Scimago H
index
18
h5-index value: 15
h5-index15
Download
Short summary
This work presents a novel design of a low power high-temperature MEMS elliptical capacitive pressure sensor that can be utilized within wireless sensor systems, e.g. TPMS. Throughout numerical and analytical analysis, it was found that sensor sensitivity and temperature resistance could be increased if the diaphragm area has two symmetrical segments of chords parallel to the major axis removed, and if diaphragm deformation increases the separation distance between the sensing capacitor plates.
Articles | Volume 5, issue 1
J. Sens. Sens. Syst., 5, 95–112, 2016
https://doi.org/10.5194/jsss-5-95-2016
J. Sens. Sens. Syst., 5, 95–112, 2016
https://doi.org/10.5194/jsss-5-95-2016

Regular research article 30 Mar 2016

Regular research article | 30 Mar 2016

A micro-capacitive pressure sensor design and modelling

Ali E. Kubba et al.

Viewed

Total article views: 4,596 (including HTML, PDF, and XML)
HTML PDF XML Total BibTeX EndNote
1,368 3,142 86 4,596 103 117
  • HTML: 1,368
  • PDF: 3,142
  • XML: 86
  • Total: 4,596
  • BibTeX: 103
  • EndNote: 117
Views and downloads (calculated since 30 Mar 2016)
Cumulative views and downloads (calculated since 30 Mar 2016)

Cited

Latest update: 18 Oct 2021

Publications Copernicus
Download
Short summary
This work presents a novel design of a low power high-temperature MEMS elliptical capacitive pressure sensor that can be utilized within wireless sensor systems, e.g. TPMS. Throughout numerical and analytical analysis, it was found that sensor sensitivity and temperature resistance could be increased if the diaphragm area has two symmetrical segments of chords parallel to the major axis removed, and if diaphragm deformation increases the separation distance between the sensing capacitor plates.
Citation