A micro-capacitive pressure sensor design and modelling

Kubba, Ali E.; Hasson, Ahmed; Kubba, Ammar I.; Hall, Gregory

doi:10.5194/jsss-5-95-2016

Articles | Volume 5, issue 1

https://doi.org/10.5194/jsss-5-95-2016

© Author(s) 2016. This work is distributed under
the Creative Commons Attribution 3.0 License.

https://doi.org/10.5194/jsss-5-95-2016

© Author(s) 2016. This work is distributed under
the Creative Commons Attribution 3.0 License.

Articles | Volume 5, issue 1

Regular research article

|

30 Mar 2016

Regular research article |

| 30 Mar 2016

A micro-capacitive pressure sensor design and modelling

Ali E. Kubba, Ahmed Hasson, Ammar I. Kubba, and Gregory Hall

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Mar 2016	16	5	1	22
Apr 2016	65	102	0	167
May 2016	40	23	3	66
Jun 2016	55	15	0	70
Jul 2016	11	9	2	22
Aug 2016	13	12	0	25
Sep 2016	11	10	2	23
Oct 2016	4	18	1	23
Nov 2016	10	22	0	32
Dec 2016	7	21	0	28
Jan 2017	16	36	0	52
Feb 2017	4	17	1	22
Mar 2017	18	62	0	80
Apr 2017	81	64	0	145
May 2017	16	73	0	89
Jun 2017	13	40	1	54
Jul 2017	8	54	0	62
Aug 2017	8	41	0	49
Sep 2017	18	44	0	62
Oct 2017	11	69	0	80
Nov 2017	20	91	4	115
Dec 2017	16	88	3	107
Jan 2018	10	56	1	67
Feb 2018	23	58	3	84
Mar 2018	10	66	1	77
Apr 2018	11	67	1	79
May 2018	23	72	1	96
Jun 2018	10	60	2	72
Jul 2018	15	63	1	79
Aug 2018	16	61	2	79
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Oct 2018	17	107	3	127
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Jan 2019	18	83	1	102
Feb 2019	10	52	1	63
Mar 2019	11	71	1	83
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May 2019	31	108	3	142
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Feb 2020	14	33	0	47
Mar 2020	20	31	1	52
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Oct 2020	23	26	1	50
Nov 2020	27	17	0	44
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Feb 2021	20	23	1	44
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Jan 2022	33	26	4	63
Feb 2022	33	18	2	53
Mar 2022	26	19	3	48
Apr 2022	31	20	2	53
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Dec 2022	30	10	0	40
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Feb 2023	33	13	0	46
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Feb 2024	17	13	1	31
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May 2024	21	7	0	28
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Jul 2024	33	14	3	50
Aug 2024	39	15	3	57
Sep 2024	26	14	1	41
Oct 2024	39	24	1	64
Nov 2024	42	23	3	68
Dec 2024	28	24	1	53
Jan 2025	21	29	1	51
Feb 2025	40	34	0	74
Mar 2025	28	26	0	54
Apr 2025	36	19	1	56
May 2025	57	21	1	79
Jun 2025	36	23	0	59
Jul 2025	22	12	1	35
Aug 2025	42	35	1	78
Sep 2025	49	35	1	85
Oct 2025	40	24	5	69
Nov 2025	54	35	1	90
Dec 2025	14	4	0	18

Cumulative views and downloads (calculated since 30 Mar 2016)

Month	HTML	PDF	XML	Total
Mar 2016	16	5	1	22
Apr 2016	65	102	0	167
May 2016	40	23	3	66
Jun 2016	55	15	0	70
Jul 2016	11	9	2	22
Aug 2016	13	12	0	25
Sep 2016	11	10	2	23
Oct 2016	4	18	1	23
Nov 2016	10	22	0	32
Dec 2016	7	21	0	28
Jan 2017	16	36	0	52
Feb 2017	4	17	1	22
Mar 2017	18	62	0	80
Apr 2017	81	64	0	145
May 2017	16	73	0	89
Jun 2017	13	40	1	54
Jul 2017	8	54	0	62
Aug 2017	8	41	0	49
Sep 2017	18	44	0	62
Oct 2017	11	69	0	80
Nov 2017	20	91	4	115
Dec 2017	16	88	3	107
Jan 2018	10	56	1	67
Feb 2018	23	58	3	84
Mar 2018	10	66	1	77
Apr 2018	11	67	1	79
May 2018	23	72	1	96
Jun 2018	10	60	2	72
Jul 2018	15	63	1	79
Aug 2018	16	61	2	79
Sep 2018	15	51	2	68
Oct 2018	17	107	3	127
Nov 2018	15	94	3	112
Dec 2018	19	81	4	104
Jan 2019	18	83	1	102
Feb 2019	10	52	1	63
Mar 2019	11	71	1	83
Apr 2019	18	68	2	88
May 2019	31	108	3	142
Jun 2019	15	88	0	103
Jul 2019	17	74	1	92
Aug 2019	13	64	0	77
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Oct 2019	19	63	1	83
Nov 2019	33	58	2	93
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May 2020	14	33	0	47
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Jul 2020	33	21	15	69
Aug 2020	11	16	3	30
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Mar 2024	24	30	3	57
Apr 2024	32	22	4	58
May 2024	21	7	0	28
Jun 2024	48	13	3	64
Jul 2024	33	14	3	50
Aug 2024	39	15	3	57
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Oct 2024	39	24	1	64
Nov 2024	42	23	3	68
Dec 2024	28	24	1	53
Jan 2025	21	29	1	51
Feb 2025	40	34	0	74
Mar 2025	28	26	0	54
Apr 2025	36	19	1	56
May 2025	57	21	1	79
Jun 2025	36	23	0	59
Jul 2025	22	12	1	35
Aug 2025	42	35	1	78
Sep 2025	49	35	1	85
Oct 2025	40	24	5	69
Nov 2025	54	35	1	90
Dec 2025	14	4	0	18

Latest update: 06 Dec 2025

Short summary

This work presents a novel design of a low power high-temperature MEMS elliptical capacitive pressure sensor that can be utilized within wireless sensor systems, e.g. TPMS. Throughout numerical and analytical analysis, it was found that sensor sensitivity and temperature resistance could be increased if the diaphragm area has two symmetrical segments of chords parallel to the major axis removed, and if diaphragm deformation increases the separation distance between the sensing capacitor plates.