Articles | Volume 5, issue 1
https://doi.org/10.5194/jsss-5-95-2016
© Author(s) 2016. This work is distributed under
the Creative Commons Attribution 3.0 License.
the Creative Commons Attribution 3.0 License.
https://doi.org/10.5194/jsss-5-95-2016
© Author(s) 2016. This work is distributed under
the Creative Commons Attribution 3.0 License.
the Creative Commons Attribution 3.0 License.
A micro-capacitive pressure sensor design and modelling
Fusion Innovations Ltd., Research and Innovation Services, Birmingham
Research Park, Vincent Drive, Edgbaston, Birmingham, B15 2SQ, UK
Ahmed Hasson
Fusion Innovations Ltd., Research and Innovation Services, Birmingham
Research Park, Vincent Drive, Edgbaston, Birmingham, B15 2SQ, UK
Ammar I. Kubba
School of Engineering, Mechanical Engineering, University of
Birmingham, Edgbaston, Birmingham, B15 2TT, UK
Gregory Hall
Fusion Innovations Ltd., Research and Innovation Services, Birmingham
Research Park, Vincent Drive, Edgbaston, Birmingham, B15 2SQ, UK
Viewed
Total article views: 6,560 (including HTML, PDF, and XML)
Cumulative views and downloads
(calculated since 30 Mar 2016)
HTML | XML | Total | BibTeX | EndNote | |
---|---|---|---|---|---|
2,468 | 3,915 | 177 | 6,560 | 157 | 175 |
- HTML: 2,468
- PDF: 3,915
- XML: 177
- Total: 6,560
- BibTeX: 157
- EndNote: 175
Cited
27 citations as recorded by crossref.
- The Fabrication and Evaluation of a Capacitive Pressure Sensor Using Ru-Based Thin Film Metallic Glass with Structural Relaxation by Heat Treatment H. Otsuka et al. 10.3390/s23239557
- Development and characterization of a novel nanocomposite-polymer based piezoresistive pressure sensor for low-pressure application S. Chauhan et al. 10.1177/09544062231207151
- Biomedical Catheters With Integrated Miniature Piezoresistive Pressure Sensors: A Review K. Meena & A. Sankar 10.1109/JSEN.2021.3057222
- Recent Progress on Flexible Capacitive Pressure Sensors: From Design and Materials to Applications R. Mishra et al. 10.1002/admt.202001023
- Mathematical Modelling and Comparative Study of Elliptical and Circular Capacitive Pressure Microsensor R. Mishra & S. Santosh Kumar 10.1088/1742-6596/1240/1/012068
- Performance Optimization of Pressure Sensor Based on Suspended Gate MOSFET K. Salah & K. Fouad 10.4028/www.scientific.net/AEF.30.43
- Characterizing deep brain biosignals: The advances and applications of implantable MEMS-based devices H. Wu et al. 10.1016/j.mtadv.2022.100322
- Neo-Hookean modeling of nonlinear coupled behavior in circular plates supported by micro-pillars N. Ahmadi et al. 10.1038/s41598-024-76528-1
- Development of IOT-based low-cost MEMS pressure sensor for groundwater level monitoring M. Barzegar et al. 10.1088/1361-6501/ace78f
- Bioresorbable Electronic Implants: History, Materials, Fabrication, Devices, and Clinical Applications G. Cha et al. 10.1002/adhm.201801660
- Innovative pressure sensing with amorphous silicon nanostructures: Exploring applications in sports training supervision X. Xing et al. 10.1016/j.aej.2024.07.003
- Modeling of a square-shape ZnO, ZnS and AlN membrane for mems capacitive pressure-sensor applications A. Dagamseh et al. 10.1051/smdo/2020010
- Tunable soft pressure sensors based on magnetic coupling mediated by hyperelastic materials C. Romano et al. 10.20517/ss.2024.24
- Flexible Textile-Based Pressure Sensing System Applied in the Operating Room for Pressure Injury Monitoring of Cardiac Operation Patients D. Shih et al. 10.3390/s20164619
- Design of a Sensor Structure for Linear Displacement Measurement Based on a Capacitive Grid Sensor C. Chen et al. 10.1109/JSEN.2024.3446580
- A Force Myography (FMG) Armband Based on Micro‐Structured Textile‐Pressure Sensors for Human‐Machine Interface (HMI) R. Tchantchane et al. 10.1002/adsr.202500012
- Nonlinear vibration control with nanocapacitive sensor for electrostatically actuated nanobeam Q. Gong et al. 10.1177/1461348417725953
- Design optimisation of high sensitivity MEMS piezoresistive intracranial pressure sensor using Taguchi approach M. Mohamad et al. 10.1007/s00542-017-3699-8
- A Self-Temperature Compensation Barometer Based on All-Quartz Resonant Pressure Sensor D. Han et al. 10.3390/s24082460
- Research of Long-Term Stability of High-Sensitivity Piezoresistive Pressure Sensors for Ultralow Differential Pressures M. Basov 10.1109/JSEN.2024.3455379
- A novel graphene pressure sensor with zig–zag shaped piezoresistors for maximum strain coverage for enhancing the sensitivity of the pressure sensor M. Nag et al. 10.1051/smdo/2021013
- Large area flexible pressure/strain sensors and arrays using nanomaterials and printing techniques C. Parameswaran & D. Gupta 10.1186/s40580-019-0198-x
- Parametric model of resonant differential MEMS pressure sensors: enabling rapid structural optimization and automated layout design A. Chen et al. 10.1088/1361-6501/ad95a9
- Design and simulation of MEMS based capacitive pressure sensor for harsh environment K. Srinivasa Rao et al. 10.1007/s00542-019-04735-2
- Modeling and Analysis of SiC Capacitive Pressure Sensors Based on FEA Postprocessing With Infinitesimal Approach C. Liu et al. 10.1109/JSEN.2022.3164452
- Method for Sensitivity Improvement of MEMS Pressure Sensor: Structural Design and Optimization of Concave Resonant Pressure Sensor S. Chuai et al. 10.1109/JSEN.2025.3526621
- Design and implementation of smart pressure sensor for automotive applications H. Soy & İ. Toy 10.1016/j.measurement.2021.109184
Latest update: 01 Apr 2025
Short summary
This work presents a novel design of a low power high-temperature MEMS elliptical capacitive pressure sensor that can be utilized within wireless sensor systems, e.g. TPMS. Throughout numerical and analytical analysis, it was found that sensor sensitivity and temperature resistance could be increased if the diaphragm area has two symmetrical segments of chords parallel to the major axis removed, and if diaphragm deformation increases the separation distance between the sensing capacitor plates.
This work presents a novel design of a low power high-temperature MEMS elliptical capacitive...