A micro-capacitive pressure sensor design and modelling

Kubba, Ali E.; Hasson, Ahmed; Kubba, Ammar I.; Hall, Gregory

doi:https://doi.org/10.5194/jsss-5-95-2016

Articles | Volume 5, issue 1

https://doi.org/10.5194/jsss-5-95-2016

© Author(s) 2016. This work is distributed under
the Creative Commons Attribution 3.0 License.

https://doi.org/10.5194/jsss-5-95-2016

© Author(s) 2016. This work is distributed under
the Creative Commons Attribution 3.0 License.

Articles | Volume 5, issue 1

Regular research article

|

30 Mar 2016

Regular research article |

| 30 Mar 2016

A micro-capacitive pressure sensor design and modelling

Ali E. Kubba, Ahmed Hasson, Ammar I. Kubba, and Gregory Hall

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