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Journal of Sensors and Sensor Systems An open-access peer-reviewed journal
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Volume 5, issue 1
J. Sens. Sens. Syst., 5, 95–112, 2016
https://doi.org/10.5194/jsss-5-95-2016
© Author(s) 2016. This work is distributed under
the Creative Commons Attribution 3.0 License.
J. Sens. Sens. Syst., 5, 95–112, 2016
https://doi.org/10.5194/jsss-5-95-2016
© Author(s) 2016. This work is distributed under
the Creative Commons Attribution 3.0 License.

Regular research article 30 Mar 2016

Regular research article | 30 Mar 2016

A micro-capacitive pressure sensor design and modelling

Ali E. Kubba et al.

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This work presents a novel design of a low power high-temperature MEMS elliptical capacitive pressure sensor that can be utilized within wireless sensor systems, e.g. TPMS. Throughout numerical and analytical analysis, it was found that sensor sensitivity and temperature resistance could be increased if the diaphragm area has two symmetrical segments of chords parallel to the major axis removed, and if diaphragm deformation increases the separation distance between the sensing capacitor plates.
This work presents a novel design of a low power high-temperature MEMS elliptical capacitive...
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