Articles | Volume 6, issue 1
https://doi.org/10.5194/jsss-6-1-2017
https://doi.org/10.5194/jsss-6-1-2017
Regular research article
 | 
09 Jan 2017
Regular research article |  | 09 Jan 2017

A mode-localized MEMS electrical potential sensor based on three electrically coupled resonators

Chun Zhao, Graham S. Wood, Suan Hui Pu, and Michael Kraft

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