Articles | Volume 6, issue 1
J. Sens. Sens. Syst., 6, 1–8, 2017
https://doi.org/10.5194/jsss-6-1-2017
J. Sens. Sens. Syst., 6, 1–8, 2017
https://doi.org/10.5194/jsss-6-1-2017
Regular research article
09 Jan 2017
Regular research article | 09 Jan 2017

A mode-localized MEMS electrical potential sensor based on three electrically coupled resonators

Chun Zhao et al.

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