Regular research article
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09 Jan 2017
Regular research article |
![](https://contentmanager.copernicus.org/2175966/501/ssl)
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09 Jan 2017
A mode-localized MEMS electrical potential sensor based on three electrically coupled resonators
Chun Zhao, Graham S. Wood, Suan Hui Pu, and Michael Kraft
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Latest update: 02 Jul 2024