A mode-localized MEMS electrical potential sensor based on three electrically coupled resonators
Chun Zhao et al.
Related subject area
Sensor technologies: MEMS technologyPhase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensorsCalibration of tri-axial MEMS accelerometers in the low-frequency range – Part 2: Uncertainty assessmentCalibration of tri-axial MEMS accelerometers in the low-frequency range – Part 1: comparison among methodsConcept for a MEMS-type vacuum sensor based on electrical conductivity measurements
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