Articles | Volume 6, issue 1
https://doi.org/10.5194/jsss-6-1-2017
© Author(s) 2017. This work is distributed under the Creative Commons Attribution 3.0 License.
Regular research article
| 
09 Jan 2017
Regular research article |
| 09 Jan 2017
A mode-localized MEMS electrical potential sensor based on three electrically coupled resonators
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