Articles | Volume 6, issue 1
J. Sens. Sens. Syst., 6, 1–8, 2017
https://doi.org/10.5194/jsss-6-1-2017
J. Sens. Sens. Syst., 6, 1–8, 2017
https://doi.org/10.5194/jsss-6-1-2017

Regular research article 09 Jan 2017

Regular research article | 09 Jan 2017

A mode-localized MEMS electrical potential sensor based on three electrically coupled resonators

Chun Zhao et al.

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Cited articles

Chang, H., Xie, J., Fu, Q., Shen, Q., and Yuan, W.: Micromachined inertial measurement unit fabricated by a SOI process with selective roughening under structures, IET Micro & Nano Letters, 6, 486–489, 2011.
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Jaramillo, G., Buffa, C., Li, M., Brechtel, F. J., Langfelder, G., and Horsley, D. A.: MEMS electrometer with femtoampere resolution for aerosol particulate measurements, IEEE Sens. J., 13, 2993–3000, 2013.
Lassagne, B., Garcia-Sanchez, D., Aguasca, A., and Bachtold, A.: Ultrasensitive mass sensing with a nanotube electromechanical resonator, Nano Lett., 8, 3735–3738, 2008.
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