Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 8, issue 2
Articles | Volume 8, issue 2
https://doi.org/10.5194/jsss-8-293-2019
© Author(s) 2019. This work is distributed under
the Creative Commons Attribution 4.0 License.
https://doi.org/10.5194/jsss-8-293-2019
© Author(s) 2019. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 8, issue 2
Regular research article
 | 
09 Oct 2019
Regular research article |  | 09 Oct 2019

A two-port electrothermal model for suspended MEMS device structures with multiple inputs

Johan Schoeman and Monuko du Plessis

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Short summary
The work proposes a novel model that describes the combined electrical and thermal interaction that exists between two elements that share the same suspended thermal reservoir. The model predicts the change in the electrical properties that the target element experiences when the source element heats up due to an applied electric power. The current convention is to assume the interaction as ideal, but we have shown that thermal losses exist that our model accounts for.
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