Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 8, issue 1
Articles | Volume 8, issue 1
https://doi.org/10.5194/jsss-8-37-2019
© Author(s) 2019. This work is distributed under
the Creative Commons Attribution 4.0 License.
Special issue:
https://doi.org/10.5194/jsss-8-37-2019
© Author(s) 2019. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 8, issue 1
Regular research article
 | 
14 Jan 2019
Regular research article |  | 14 Jan 2019

Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors

Andi Setiono, Michael Fahrbach, Jiushuai Xu, Maik Bertke, Wilson Ombati Nyang'au, Gerry Hamdana, Hutomo Suryo Wasisto, and Erwin Peiner

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Short summary
In this work, methods to reveal a symmetrical amplitude shape from the asymmetric behavior in thermally actuated piezoresistive cantilever sensors are proposed. The symmetrical amplitude shape should then be accompanied by a monotonic phase response. With the monotonic phase response, real-time frequency tracking can be easier to implement using a phase-locked-loop (PLL) system.
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Special issue
Sensors and Measurement Systems 2018