Articles | Volume 8, issue 1
https://doi.org/10.5194/jsss-8-37-2019
© Author(s) 2019. This work is distributed under the Creative Commons Attribution 4.0 License.
Special issue:
Regular research article
| 
14 Jan 2019
Regular research article |
| 14 Jan 2019
| 14 Jan 2019
Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors
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