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JSSS | Articles | Volume 8, issue 1
J. Sens. Sens. Syst., 8, 37–48, 2019
https://doi.org/10.5194/jsss-8-37-2019
© Author(s) 2019. This work is distributed under
the Creative Commons Attribution 4.0 License.

Special issue: Sensors and Measurement Systems 2018

J. Sens. Sens. Syst., 8, 37–48, 2019
https://doi.org/10.5194/jsss-8-37-2019
© Author(s) 2019. This work is distributed under
the Creative Commons Attribution 4.0 License.

Regular research article 14 Jan 2019

Regular research article | 14 Jan 2019

Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors

Andi Setiono et al.

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In this work, methods to reveal a symmetrical amplitude shape from the asymmetric behavior in thermally actuated piezoresistive cantilever sensors are proposed. The symmetrical amplitude shape should then be accompanied by a monotonic phase response. With the monotonic phase response, real-time frequency tracking can be easier to implement using a phase-locked-loop (PLL) system.
In this work, methods to reveal a symmetrical amplitude shape from the asymmetric behavior in...
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