Articles | Volume 8, issue 1
https://doi.org/10.5194/jsss-8-37-2019
https://doi.org/10.5194/jsss-8-37-2019
Regular research article
 | 
14 Jan 2019
Regular research article |  | 14 Jan 2019

Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors

Andi Setiono, Michael Fahrbach, Jiushuai Xu, Maik Bertke, Wilson Ombati Nyang'au, Gerry Hamdana, Hutomo Suryo Wasisto, and Erwin Peiner

Cited articles

Al horr, Y., Arif, M., Katafygiotou, M., Mazroei, A., Kaushik, A., and Elsarrag, E.: Impact of indoor environmental quality on occupant well-being and comfort: A review of the literature, International Journal of Sustainable Built Environment, 5, 1–11, https://doi.org/10.1016/j.ijsbe.2016.03.006, 2016. 
Bausells, J.: Piezoresistive cantilevers for nanomechanical sensing, Microelectron. Eng., 145, 9–20, https://doi.org/10.1016/j.mee.2015.02.010, 2015. 
Bertke, M., Hamdana, G., Wu, W., Marks, M., Wasisto, H. S., and Peiner, E.: Asymmetric resonance frequency analysis of in-plane electrothermal silicon cantilevers for nanoparticle sensors, J. Phys.-Conf. Ser., 757, 12006, https://doi.org/10.1088/1742-6596/757/1/012006, 2016. 
Bertke, M., Hamdana, G., Wu, W., Wasisto, H. S., Uhde, E., and Peiner, E.: Analysis of asymmetric resonance response of thermally excited silicon micro-cantilevers for mass-sensitive nanoparticle detection, J. Micromech. Microeng., 27, 64001, https://doi.org/10.1088/1361-6439/aa6b0d, 2017a. 
Bertke, M., Wu, W., Wasisto, H. S., Uhde, E., and Peiner, E.: Size-selective electrostatic sampling and removal of nanoparticles on silicon cantilever sensors for air-quality monitoring, in: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, Taiwan, IEEE, 1493–1496, 2017b. 
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Short summary
In this work, methods to reveal a symmetrical amplitude shape from the asymmetric behavior in thermally actuated piezoresistive cantilever sensors are proposed. The symmetrical amplitude shape should then be accompanied by a monotonic phase response. With the monotonic phase response, real-time frequency tracking can be easier to implement using a phase-locked-loop (PLL) system.
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