Articles | Volume 8, issue 1
J. Sens. Sens. Syst., 8, 49–56, 2019
https://doi.org/10.5194/jsss-8-49-2019

Special issue: Sensors and Measurement Systems 2018

J. Sens. Sens. Syst., 8, 49–56, 2019
https://doi.org/10.5194/jsss-8-49-2019
Regular research article
16 Jan 2019
Regular research article | 16 Jan 2019

Novel radio-frequency-based gas sensor with integrated heater

Stefanie Walter et al.

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Latest update: 28 Sep 2022
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Short summary
A planar resonant radio-frequency gas sensor was equipped with an integrated heater. By simulative geometry optimization it now can be operated up to 700 °C. Sensitive materials with gas-dependent dielectric properties at higher temperatures can now be used. By coating the sensor with zeolite, ammonia could be detected. Depending on the working temperature, the sensor returns either a dosimeter signal (low temperatures) or a gas-concentration-dependent radio-frequency signal (high temperatures).