Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 9, issue 2
Articles | Volume 9, issue 2
https://doi.org/10.5194/jsss-9-179-2020
© Author(s) 2020. This work is distributed under
the Creative Commons Attribution 4.0 License.
Special issue:
https://doi.org/10.5194/jsss-9-179-2020
© Author(s) 2020. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 9, issue 2
Regular research article
 | 
07 Jul 2020
Regular research article |  | 07 Jul 2020

Calibrating a high-speed contact-resonance profilometer

Michael Fahrbach, Sebastian Friedrich, Brunero Cappella, and Erwin Peiner

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Short summary
European EMPIR project MicroProbes aims to use large-cale tactile microprobes for contact resonance applications, an established measurement mode of atomic force microscopes (AFMs). Because of the size of these probes, some of the simplifications made for AFM probes are not applicable. This study presents a guide on how to systematically create a model that replicates the dynamic behavior of microprobes. The finished model is then verified by analyzing a series of measurements.
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Sensors and Measurement Systems 2019