Articles | Volume 9, issue 2
https://doi.org/10.5194/jsss-9-179-2020
© Author(s) 2020. This work is distributed under the Creative Commons Attribution 4.0 License.
Special issue:
Regular research article
| 
07 Jul 2020
Regular research article |
| 07 Jul 2020
| 07 Jul 2020
Calibrating a high-speed contact-resonance profilometer
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Cited articles
Bertke, M., Fahrbach, M., Hamdana, G., Xu, J., Wasisto, H. S., and Peiner, E.: Contact resonance spectroscopy for on-the-machine manufactory monitoring, Sensors Actuat. A, 279, 501–508, https://doi.org/10.1016/j.sna.2018.06.012, 2018.
Brand, U., Xu, M., Doering, L., Langfahl-Klabes, J., Behle, H., Bütefisch, S., Ahbe, T., Peiner, E., Völlmeke, S., Frank, T., Mickan, B., Kiselev, I., Hauptmannl, M., and Drexel, M.: Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm, Sensors, 19, 1410, https://doi.org/10.3390/s19061410, 2019.
Cappella, B.: Mechanical Properties of Polymers Measured through AFM
Force-Distance Curves, Springer International Publishing, Switzerland, https://doi.org/10.1007/978-3-319-29459-9, 2016.
CiS Forschungsinstitut für Mikrosensorik GmbH: Mikrotastspitzen/Kraftsensoren, available at:
https://www.cismst.de/loesungen/mikrotastspitzen/, last access: 10 September 2019.
Doering, L., Brand, U., Bütefisch, S., Ahbe, T., Weimann, T., Peiner, E., and Frank, T.: High-speed microprobe for roughness measurements in high-aspect-ratio microstructures, Meas. Sci. Technol., 28, 2–19, https://doi.org/10.3390/s19061410, 2017.
