Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 9, issue 1
Articles | Volume 9, issue 1
https://doi.org/10.5194/jsss-9-71-2020
© Author(s) 2020. This work is distributed under
the Creative Commons Attribution 4.0 License.
Special issue:
https://doi.org/10.5194/jsss-9-71-2020
© Author(s) 2020. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 9, issue 1
Regular research article
 | 
27 Feb 2020
Regular research article |  | 27 Feb 2020

Determination of the mixing ratio of a flowing gas mixture with self-actuated microcantilevers

Jaqueline Stauffenberg, Steve Durstewitz, Martin Hofmann, Tzvetan Ivanov, Mathias Holz, Waleed Ehrhardt, Wolf-Ulrich Riegel, Jens-Peter Zöllner, Eberhard Manske, and Ivo Rangelow

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Latest update: 31 Oct 2025
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Short summary
In this work, a self-actuated microcantilever is used as a flow sensor. Its resonance frequency, resonance amplitude and static deflection are measured. Most conventional flow sensors are often only calibrated for one type of gas and allow an analysis of gas mixtures only with increased effort. The work examines whether the volumetric flow and the mixing ratio of a binary gas mixture are possible simultaneously from these measured variables.
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Special issue
Sensors and Measurement Systems 2019