Articles | Volume 9, issue 1
https://doi.org/10.5194/jsss-9-71-2020
https://doi.org/10.5194/jsss-9-71-2020
Regular research article
 | 
27 Feb 2020
Regular research article |  | 27 Feb 2020

Determination of the mixing ratio of a flowing gas mixture with self-actuated microcantilevers

Jaqueline Stauffenberg, Steve Durstewitz, Martin Hofmann, Tzvetan Ivanov, Mathias Holz, Waleed Ehrhardt, Wolf-Ulrich Riegel, Jens-Peter Zöllner, Eberhard Manske, and Ivo Rangelow

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Cited articles

Badarlis, A., Pfau, A., and Kalfas, A.: Measurement and Evaluation of the Gas Density and Viscosity of Pure Gases and Mixtures Using a Micro-Cantilever Beam, Sensors, 15, 24318–24342, https://doi.org/10.3390/s150924318, 2015. a
Egorov, A. G., Kamalutdinov, A. M., Nuriev, A. N., and Paimushin, V. N.: Theoretical-Experimental Method for Determining the Parameters of Damping Based on the Study of Damped Flexural Vibrations of Test Specimens. 2. Aerodynamic Component of Damping, Mech. Compos. Mater., 50, 267–278, https://doi.org/10.1134/S0021894416020103, 2014. a
Ejeian, F., Azadi, S., Razmjou, A., Orooji, Y., Kottapalli, A., Warkiani, M., and Asadnia, M.: Design and applications of MEMS flow sensors: A review, Sensor. Actuat. A-Phys., 295, 483–502, https://doi.org/10.1016/j.sna.2019.06.020, 2019. a
Hao, J., Erbil, A., and Ayazi, F.: An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations, Sensor. Actuat. A-Phys., 109, 156–164, https://doi.org/10.1016/j.sna.2003.09.037, 2003. a
Hosaka, H., Itao, K., and Kuroda, S.: Damping characteristics of beam-shaped micro-oscillators, Sensor. Actuat. A-Phys., 49, 87–95, https://doi.org/10.1016/0924-4247(95)01003-J, 1995. a
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Short summary
In this work, a self-actuated microcantilever is used as a flow sensor. Its resonance frequency, resonance amplitude and static deflection are measured. Most conventional flow sensors are often only calibrated for one type of gas and allow an analysis of gas mixtures only with increased effort. The work examines whether the volumetric flow and the mixing ratio of a binary gas mixture are possible simultaneously from these measured variables.