Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 10, issue 1
Articles | Volume 10, issue 1
https://doi.org/10.5194/jsss-10-121-2021
© Author(s) 2021. This work is distributed under
the Creative Commons Attribution 4.0 License.
Special issue:
https://doi.org/10.5194/jsss-10-121-2021
© Author(s) 2021. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 10, issue 1
Regular research article
 | 
03 May 2021
Regular research article |  | 03 May 2021

Determination of optimal crystallographic orientations for LiNbO3 and LiTaO3 bimorph actuators

Oleh Buryy, Ihor I. Syvorotka, Yuriy Suhak, Uliana Yakhnevych, Dmytro Sugak, Sergii Ubizskii, and Holger Fritze

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Short summary
The actuators of precise positioning based on LiNbO3 or LiTaO3 bimorph structures are considered. They consist of two joined plates: one of them lengthens and the other one shortens under the influence of an electric field and, as a result, the actuator bends. Such a device ensures small movements of probes in scanning probe microscopes, micro-electromechanical systems, micro-motors, etc. We determine the optimal orientations of the plates, ensuring the highest possible actuator displacements.
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Sensors and Measurement Science International SMSI 2020