Articles | Volume 10, issue 1
https://doi.org/10.5194/jsss-10-121-2021
https://doi.org/10.5194/jsss-10-121-2021
Regular research article
 | 
03 May 2021
Regular research article |  | 03 May 2021

Determination of optimal crystallographic orientations for LiNbO3 and LiTaO3 bimorph actuators

Oleh Buryy, Ihor I. Syvorotka, Yuriy Suhak, Uliana Yakhnevych, Dmytro Sugak, Sergii Ubizskii, and Holger Fritze

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Cited articles

Antipov, V. V., Bykov, A. S., Malinkovich, M. D., and Parkhomenko, Y. N.: Formation of bidomain structure in lithium niobate single crystals by electrothermal method, Ferroelectrics, 374, 65–72, https://doi.org/10.1080/00150190802427127, 2008. 
Buryy, O., Andrushchak, A., Kushnir, O., Ubizskii, S., Vynnyk, D., Yurkevych, O., Larchenko, A., Chaban, K., Gotra, O., and Kityk, A.: Method of extreme surfaces for optimizing the geometry of acousto-optic interactions in crystalline materials: Example of LiNbO3 crystals, J. Appl. Phys., 46, 083103, https://doi.org/10.1063/1.4792304, 2013. 
Buryy, O., Sugak, D., Syvorotka, I., Yakhnevich, U., Suhak, Yu., Ubizskii, S., and Fritze, H.: Simulation, making and testing of the actuator of precise positioning based on bimorph plate of lithium niobate, Proc. of IEEE 15th International Conference on the Perspective Technologies and Methods in MEMS Design (MEMTECH), 22–26 May 2019, Polyana, Ukraine, 148–152, https://doi.org/10.1109/MEMSTECH.2019.8817401, 2019. 
Bykov, A. S., Grigoryan, S. G., Zhukov, R. N., Kiselev, D. A., Ksenich, S. V., Kubasov, I. V., Malinkovich, M. D., and Parkhomenko, Yu. N.: Formation of bidomain structure in lithium niobate plates by the stationary external heating method, Russ. Microelectronics, 43, 536–542, https://doi.org/10.1134/S1063739714080034, 2014. 
Jiang, W., Mayor, F. M., Patel, R. N., McKenna, T. P., Sarabalis, C. J., and Safavi-Naeini, A. H.: Nanobenders as efficient piezoelectric actuators for widely tunable nanophotonics at CMOS-level voltages, Communications Physics, 3, 156, https://doi.org/10.1038/s42005-020-00412-3, 2020. 
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Short summary
The actuators of precise positioning based on LiNbO3 or LiTaO3 bimorph structures are considered. They consist of two joined plates: one of them lengthens and the other one shortens under the influence of an electric field and, as a result, the actuator bends. Such a device ensures small movements of probes in scanning probe microscopes, micro-electromechanical systems, micro-motors, etc. We determine the optimal orientations of the plates, ensuring the highest possible actuator displacements.